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Acta Optica Sinica, Volume. 37, Issue 7, 722003(2017)

Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System

Wang Wei1,2, Bayanheshig1, Pan Mingzhong1, Song Ying1, and Li Wenhao1
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  • 2[in Chinese]
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    Article index updated: Mar. 10, 2025

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    Wang Wei, Bayanheshig, Pan Mingzhong, Song Ying, Li Wenhao. Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2017, 37(7): 722003

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Dec. 14, 2016

    Accepted: --

    Published Online: Jul. 10, 2017

    The Author Email:

    DOI:10.3788/aos201737.0722003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology