Spectroscopy and Spectral Analysis, Volume. 29, Issue 3, 752(2009)

Preparation and Characterization of Poly-Si Films on DifferentTopography Substrates by AIC

WANG Cheng-long1、*, FAN Duo-wang1, LIU Hong-zhong2, ZHANG Fu-jia3, XING Da4, and LIU Song-hao4
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    WANG Cheng-long, FAN Duo-wang, LIU Hong-zhong, ZHANG Fu-jia, XING Da, LIU Song-hao. Preparation and Characterization of Poly-Si Films on DifferentTopography Substrates by AIC[J]. Spectroscopy and Spectral Analysis, 2009, 29(3): 752

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    Paper Information

    Received: Nov. 28, 2007

    Accepted: --

    Published Online: Dec. 15, 2009

    The Author Email: WANG Cheng-long (clwangee@163.com)

    DOI:10.3964/j.issn.1000-0593(2009)03-0752-04

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