Optics and Precision Engineering, Volume. 21, Issue 5, 1272(2013)

Design and experiment of micro machined vibratory gyroscope

JIA Fang-xiu*... QIU An-ping, SHI Qin and SU Yan |Show fewer author(s)
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    References(11)

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    [2] [2] SHARMA A, ZAMAN M F, ZUCHER M, et al.. A 0.1°/HR bias drift electronically matched tuning fork microgyroscope [C]. IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008, MEMS 2008, Tucson, AZ, USA, January, 2008: 6-9.

    [3] [3] XIA D ZH, SHENG X, WANG SH R. A digital prototype miniature silicon microgyroscope [C]. Proceedings of the 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems(NEWS), Xiamen, China,2010: 429-432.

    [4] [4] YANG B, WANG SH R, LI H SH, et al.. Structure error analysis and system performance test of decoupled silicon Mircro-Gyroscope [J]. Nanotechnology and Precision Engineering, 2010, 8(6): 545-552. (in Chinese)

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    JIA Fang-xiu, QIU An-ping, SHI Qin, SU Yan. Design and experiment of micro machined vibratory gyroscope[J]. Optics and Precision Engineering, 2013, 21(5): 1272

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    Paper Information

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    Received: Nov. 22, 2012

    Accepted: --

    Published Online: May. 31, 2013

    The Author Email: JIA Fang-xiu (jiafangxiu@126l.com)

    DOI:10.3788/ope.20132105.1272

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