Chinese Journal of Lasers, Volume. 51, Issue 16, 1602410(2024)
Progress in Laser Fabrication of Microsupercapacitors (Invited)
Fig. 2. Fabrication of supercapacitors by laser ablation method. (a) Fabrication of supercapacitor by laser ablation of graphene[34]; (b) fabrication of supercapacitors by combining laser ablation and electrochemical deposition[36]; (c) micro morphology of the asymmetric supercapacitor microelectrode[36]; (d) fabrication of three-dimensional (3D) supercapacitor by laser ablation of carbon nanofiber material[37]; (e) morphology of the 3D supercapacitor microelectrode[37]; (f) electrochemical performance of the 3D supercapacitor[37]
Fig. 3. Fabrication of supercapacitor by laser reduction/carbonization. (a) Fabrication process of the supercapacitor by laser reduction of graphene oxide (GO)[59]; (b) schematic diagram of laser carbonizing PI to produce laser-induced graphene (LIG)[61]; (c) scanning electronic microscopy image of the LIG[61]; (d) image of the microelectrode processed with LIG[61]
Fig. 4. Fabrication of supercapacitors by laser processing composite material. (a) Laser processing B-doped carbon electrode[80]; (b) morphology of B-doped carbon electrode[80]; (c) mechanism of laser processing Fe3O4/C composite material[81]; (d) laser-fabricated Fe3O4/C composite material flexible supercapacitor[81]
Fig. 5. Fabrication of supercapacitor by laser synthesis of functional material. (a) Fabrication of supercapacitor by laser direct writing of metal carbide[92]; (b) laser scanning of MXene to produce porous morphology[93]; (c) laser synthesis of MXene/Fe3O4 composite material[94]; (d) morphology of the MXene/Fe3O4 composite material[94]
Fig. 6. Fabrication of supercapacitors by ultrafast laser ablation. (a) Fabrication of supercapacitor by ultrafast laser ablation of MXene film[100]; (b) optical microscopy image of the ultrafast laser-fabricated MXene supercapacitor[100]; (c) fabrication of supercapacitor by double-pulse femtosecond laser ablation of MXene film[103]; (d) microelectrode array processed by double-pulse femtosecond laser[103]; (e) morphology of microelectrode gap processed by double-pulse femtosecond laser[103]
Fig. 7. Fabrication of supercapacitor by ultrafast laser Bessel beam ablation[105]. (a) Fabrication process of supercapacitor by ultrafast laser Bessel beam; (b) optical field distribution of the Bessel beam; (c) morphology of the three micro electrodes with different gap widths processed by ultrafast laser; (d) electrochemical performances of the supercapacitor; (e) microelectrode array processed by ultrafast laser
Fig. 8. Fabrication of supercapacitors by ultrafast laser-induced carbonization. (a) Processing of carbon electrode by combing ultrafast laser and alkali activation[108]; (b) supercapacitor fabricated by combining ultrafast laser and alkali activation[108]; (c) fabrication of supercapacitor by ultrafast laser carbonization of leaves[110-111]; (d)(e) morphology of the carbon electrode processed on a leaf by ultrafast laser carbonization[110-111]
Fig. 9. Fabrication of supercapacitor by ultrafast laser-induced in-situ carbonization[115]. (a) Schematic diagram of ultrafast laser-induced in-situ carbonization; (b) morphology comparison of the areas processed by laser direct carbonization and laser-induced in-situ carbonization; (c) line adjustability and patterning of the laser-induced in-situ carbonization; (d) fabrication process of the supercapacitor and the flexible electrodes; (e) size-adjustable electrodes and electrode array; (f) electrochemical performance of the carbonized supercapacitor
Fig. 10. Fabrication of supercapacitors by combining ultrafast laser processing and other technologies. (a) Fabrication of supercapacitor by combining ultrafast laser ablation and electrochemical oxidation[116]; (b) fabrication of supercapacitor by combining ultrafast laser reduction and quantum dot deposition[119]; (c) morphology of the ultrafast laser-prepared composite material[119]; (d) images of the transparent electrode processed by the ultrafast laser[119]
Fig. 11. Fabrication of supercapacitor by precursor-assisted ultrafast laser carbonization[122]. (a) Schematic diagram of the precursor-assisted ultrafast laser carbonization method; (b) morphology and composition characteristics of the composite material electrode; (c) electrochemical performance of hybrid supercapacitors; (d) schematic diagram of the hybrid supercapacitor array; (e) electrochemical performance comparison of the hybrid supercapacitor and other supercapacitors
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Jianfeng Yan, Heng Guo, Yuzhi Zhao, Sumei Wang, Liangti Qu. Progress in Laser Fabrication of Microsupercapacitors (Invited)[J]. Chinese Journal of Lasers, 2024, 51(16): 1602410
Category: Laser Micro-Nano Manufacturing
Received: May. 11, 2024
Accepted: Jul. 4, 2024
Published Online: Aug. 5, 2024
The Author Email: Yan Jianfeng (yanjianfeng@tsinghua.edu.cn)
CSTR:32183.14.CJL240868