Fig. 1. Schematic of grating.

Fig. 2. Diffraction efficiencies of the zeroth and first orders.

Fig. 3. Contour of the efficiency ratio between the first and the zeroth diffractive orders versus the period and depth.

Fig. 4. Diffraction process of the metal-mirror-based reflective grating.

Fig. 5. Schematic of laser writing system.

Fig. 6. Angular spectrum.

Fig. 7. AFM results: (a) AFM image, and (b) the profile along the line in (a).