[1] Liu Z S, Jiang Z Z, Yang R J et al. Advances and applications of new test technologies[J]. Foreign Electronic Measurement Technology, 28, 16-19(2009).

[2] Gao X, Li S H, Ma Q L et al. Development of grating-based precise displacement measurement technology[J]. Chinese Optics, 12, 741-752(2019).

[3] Wang L J, Zhang M, Zhu Y et al. Review of ultra-precision optical interferential grating encoder displacement measurement technology for immersion lithography scanner[J]. Optics and Precision Engineering, 27, 1909-1918(2019).

[4] Wang L J, Zhang M, Zhu Y et al. Ultraprecision control of homodyne frequency-shifting interference pattern phase locking system[J]. Optics and Precision Engineering, 25, 1213-1221(2017).

[5] Wang L J, Zhang M, Zhu Y et al. Ultra precision phase shift locking system for scanning interference lithography[J]. Optics and Precision Engineering, 27, 1765-1773(2019).

[6] Wang Z X, Ji C, Wang J et al. Precision displacement measurement with nanometer resolution based on transmissive laser air-wedge interference[J]. Chinese Journal of Lasers, 46, 0904006(2019).

[7] Di J J. Design of high-precision displacement measurement system based on diffractive grating[D]. Harbin: Harbin Institute of Technology(2012).

[8] Beemaraj R K. Chandra S M S, Vijayan V, et al. Computer vision measurement and optimization of surface roughness using soft computing approaches[J]. Transactions of the Institute of Measurement and Control, 42, 2475-2481(2020).

[9] Qian W. Research on image registration based on corner feature[D]. Chengdu: University of Electronic Science and Technology of China(2009).

[10] Chen X H. Application of SIFT feature matching in UAV low altitude remote sensing image processing[J]. Geology and mineral mapping, 10-12(2008).

[11] Wu P P, Guan Y D. Recognition algorithm for horizontal and vertical bar code of altered coins based on template matching[J]. Computer Engineering, 183-185(2006).

[12] Lucas B, Kanade T. An iterative image registration technique with an application to stereo vision[J]. Proceedings of the 7th International Joint Conference on Artificial Intelligence, 2, 674-679(1981).

[13] Yamaguchi I, Kato J, Ohta S et al. Image formation in phase-shifting digital holography and applications to microscopy[J]. Applied optics, 40, 6177-6186(2001).

[14] Meng X, Liu L, Jiang S et al. Detection and revision of interference spectral signals based on wavelet transforms[J]. Acta Optica Sinica, 39, 0930007(2019).

[15] Gong C L, Yang D T. Improved image zooming algorithm based on bilinear interpolation[J]. Laser & Infrared, 39, 899-901(2009).

[16] Panigrahy C, Seal A, Mahato N K et al. Quantitative texture measurement of gray-scale images: fractal dimension using an improved differential box counting method[J]. Measurement, 147, 106859(2019).

[17] Dai Y, Yi B S, Xiao J S et al. Object detection of remote sensing image based on improved rotation region proposal network[J]. Acta Optica Sinica, 40, 0111020(2020).

[18] Wang H H, Zeng N, Lu W et al. Edge detection of laser imaging radar based on wavelet transform and mathematical morphology[J]. Chinese Journal of Lasers, 35, 903-906(2008).

[19] Wang B, Wang X, Chen F et al. Pavement crack recognition based on aerial image[J]. Acta Optica Sinica, 37, 0810004(2017).