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Acta Optica Sinica, Volume. 22, Issue 11, 1300(2002)

Influence of Sputtering Power on Optical Quality of Thin Film

[in Chinese]1、*, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    Article index updated: Mar. 10, 2025

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Influence of Sputtering Power on Optical Quality of Thin Film[J]. Acta Optica Sinica, 2002, 22(11): 1300

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    Paper Information

    Category: Thin Films

    Received: Jan. 4, 2002

    Accepted: --

    Published Online: Aug. 8, 2006

    The Author Email: (feng-shimeng@163.net)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology