Acta Physica Sinica, Volume. 68, Issue 24, 248101-1(2019)

Focused ion beam based nano-kirigami/origami for three-dimensional micro/nanomanufacturing and photonic applications

Shan-Shan Chen1... Xing Liu1, Zhi-Guang Liu2, and Jia-Fang Li12,* |Show fewer author(s)
Author Affiliations
  • 1Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Lab of Nanophotonics and Ultrafine Optoelectronic Systems, School of Physics, Beijing Institute of Technology, Beijing 100081, China
  • 2Key Laboratory of Optical Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
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    References(79)

    [41] Liu Z G[J]. Ph. D. Dissertation(2019).

    [51] Xia L, Wu W G, Xu J, Hao Y L, Wang Y Y[J]. 19th IEEE International Conference on Micro Electro Mechanical Systems, 118(2006).

    [64] Antonio T, Claudio M[J]. Modelling and Control of Mechanisms and Robots, 55(1996).

    [65] Buchner T[J]. Ph. D. Dissertation(2003).

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    Shan-Shan Chen, Xing Liu, Zhi-Guang Liu, Jia-Fang Li. Focused ion beam based nano-kirigami/origami for three-dimensional micro/nanomanufacturing and photonic applications[J]. Acta Physica Sinica, 2019, 68(24): 248101-1

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    Paper Information

    Received: Sep. 30, 2019

    Accepted: --

    Published Online: Sep. 17, 2020

    The Author Email:

    DOI:10.7498/aps.68.20191494

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