Laser & Optoelectronics Progress, Volume. 51, Issue 9, 93101(2014)

Effect of Ar on the Properties of Diamond-Like Carbon Films

Yang Yongliang1、*, Yue Li1, Jia Zhijun1, Li Na1, and Tang Haolong2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(10)

    [1] [1] Cheng Yong, Wang Huisheng, Guo Yanlong. Anti- reflective and protective diamond- like carbon films on infrared windows deposited by femtosecond pulsed laser [J]. Infrared and Laser Engineering, 2012, 40(12): 2406-2407.

    [5] [5] Luo Le, Wang Yi, Chu Yaqiong, et al.. Influence of the nitrogen pressure on diamond- like carbon film deposited by pulsed laser and its infrared property [J]. Chinese J Lasers, 2011, 38(9): 0907001.

    [6] [6] Chen Guanghua, Deng Jinxiang. New Electronic Thin Films [M]. Beijing: Chemical Industry Press, 2002. 147-152.

    [7] [7] Kobayashi K, Yamamoto K, Mutsukura N, et al.. Sputtering characteristics of diamond and hydrogenated amorphous carbon films by r. f. plasma [J]. Thin Solid Films, 1990, 185(1): 71-78.

    [8] [8] Yang Li, Chen Qiang, Zhang Shouye. Microstructures and tribological properties of diamond like- carbon films grown by plasma enhanced chemical vapor deposition [J]. Chinese J Vacuum Science and Technology, 2008, 29(3): 293-295.

    [9] [9] Xue Haipeng, Lu Wenzhuang, Sun Dafei, et al.. Roman spectroscopy of nanocrystalline chemical vapor deposition diamond [J]. Chinese J Lasers, 2014, 40(7): 0707002.

    [10] [10] Xue Qunji, Wang Liping. Diamond-Like Carbon Thin Film Materials [M]. Beijing: Science Press, 2012. 43-50.

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    Yang Yongliang, Yue Li, Jia Zhijun, Li Na, Tang Haolong. Effect of Ar on the Properties of Diamond-Like Carbon Films[J]. Laser & Optoelectronics Progress, 2014, 51(9): 93101

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    Paper Information

    Category: Thin Films

    Received: Mar. 18, 2014

    Accepted: --

    Published Online: Aug. 15, 2014

    The Author Email: Yang Yongliang (310147155@qq.com)

    DOI:10.3788/lop51.093101

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