Optics and Precision Engineering, Volume. 20, Issue 9, 1960(2012)
Self-calibration for 2-D ultra-precision stage
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CUI Ji-wen, LIU Xue-ming, TAN Jiu-bin. Self-calibration for 2-D ultra-precision stage[J]. Optics and Precision Engineering, 2012, 20(9): 1960
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Received: Apr. 24, 2012
Accepted: --
Published Online: Oct. 12, 2012
The Author Email: CUI Ji-wen (cuijiwen@hit.edu.cn)
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