Chinese Optics Letters, Volume. 23, Issue 11, (2025)

Fabrication of nano-holes with tunable axial morphology via ring-lens-tailored Bessel beams [Early Posting]

Wang Pu, Li Jun, Yao Li, Li Chengyao, Da Zhengshang, Xu Shaolin
Author Affiliations
  • Xi’an Key Laboratory of High Power Laser Measurement Technology and Instrument
  • Southern University of Science and Technology Department of Mechanical and Energy Engineering
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    This paper presents a laser-based technique for fabricating nano-holes with tunable axial morphology on fused silica using ring-lens-tailored Bessel beams. Unlike conventional axicon-based Bessel methods, this approach effectively controls the beam’s axial intensity peak by simply adjusting the ring-lens radius (R). By combining theoretical simulation and experimental validation, we demonstrate that the nano-hole morphology can be precisely tuned by modulating the beam’s initial energy peak. A taper entrance can be formed, with the taper angle effectively controlled within 52° by adjusting R from 1.25 to 2.50 mm. When R exceeds 2.50 mm, the axial energy distribution becomes uniform and leads to the disappearance of the taper, resulting in a standard cylindrical hole and offering a clear process window for controlling the nano-hole morphology. This single-pulse ablation method advances precision nano-manufacturing by enabling the efficient fabrication of customized nano-holes, with potential applications in photonics, microfluidics and other nano-engineering fields.

    Paper Information

    Manuscript Accepted: Jun. 9, 2025

    Posted: Jun. 23, 2025

    DOI: 10.3788/COL202523.112201