Infrared and Laser Engineering, Volume. 46, Issue 9, 921001(2017)

Multilayer-DLC film with low inner-stress prepared by pulsed laser deposition

Lu Yimin*, Guo Yanlong, Huang Guojun, Li Wei, Wan Qiang, and Tang Huang
Author Affiliations
  • [in Chinese]
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    References(20)

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    Lu Yimin, Guo Yanlong, Huang Guojun, Li Wei, Wan Qiang, Tang Huang. Multilayer-DLC film with low inner-stress prepared by pulsed laser deposition[J]. Infrared and Laser Engineering, 2017, 46(9): 921001

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    Paper Information

    Category: 先进光学材料

    Received: Jan. 10, 2017

    Accepted: Feb. 13, 2017

    Published Online: Nov. 17, 2017

    The Author Email: Yimin Lu (luyimin_zy@163.com)

    DOI:10.3788/irla201746.0921001

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