Infrared and Laser Engineering, Volume. 46, Issue 9, 921001(2017)
Multilayer-DLC film with low inner-stress prepared by pulsed laser deposition
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Lu Yimin, Guo Yanlong, Huang Guojun, Li Wei, Wan Qiang, Tang Huang. Multilayer-DLC film with low inner-stress prepared by pulsed laser deposition[J]. Infrared and Laser Engineering, 2017, 46(9): 921001
Paper Information
Category: 先进光学材料
Received: Jan. 10, 2017
Accepted: Feb. 13, 2017
Published Online: Nov. 17, 2017
The Author Email: Yimin Lu (luyimin_zy@163.com)
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