Infrared and Laser Engineering, Volume. 46, Issue 9, 921001(2017)
Multilayer-DLC film with low inner-stress prepared by pulsed laser deposition
Multilayers diamond-like carbon film, which was composed of several thick diamond-like carbon layers and thin germanium island layers, was prepared on the germanium substrate in order to resolve the high inner-stress in the diamond-like carbon film. The diamond-like carbon layers had the main function of protection, and the germanium island layers had the buffer function to reduce the inner-stress in the diamond-like carbon film. Meanwhile, the thicknesses of the germanium layers were very thin, so they had no influence on the mechanical and infrared performances of the whole film nearly. Inner-stress in the multilayers diamond-like carbon film was 2.14 GPa, 39% lower than that of the pure diamond-like carbon film, and the multilayers diamond-like carbon film could pass the friction test stipulated in the GJB2485-95′general specification for optical coatings. The hardness of the multilayers diamond-like carbon kept high hardness of 47 GPa, and had the same surface roughness to the pure diamond-like carbon film. Therefore, the multilayers diamond-like carbon film could be used as practical protective film for infrared window.
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Lu Yimin, Guo Yanlong, Huang Guojun, Li Wei, Wan Qiang, Tang Huang. Multilayer-DLC film with low inner-stress prepared by pulsed laser deposition[J]. Infrared and Laser Engineering, 2017, 46(9): 921001
Category: 先进光学材料
Received: Jan. 10, 2017
Accepted: Feb. 13, 2017
Published Online: Nov. 17, 2017
The Author Email: Yimin Lu (luyimin_zy@163.com)