Researching | Q-enhancement of piezoelectric micro-oven-controlled MEMS resonators using honeycomb lattice phononic crystals

Chip, Volume. 3, Issue 4, 100108(2024)

Q-enhancement of piezoelectric micro-oven-controlled MEMS resonators using honeycomb lattice phononic crystals

Yuhao Xiao¹, Kewen Zhu¹, Jinzhao Han¹, Sheng Liu^1,2,3, and Guoqiang Wu^1,2,3、*

Author Affiliations

¹Institute of Technological Sciences, Wuhan University, Wuhan 430072, China

²Hubei Yangtze Memory Laboratories, Wuhan 430205, China

³School of Microelectronics, Wuhan University, Wuhan 430072, China

show less

Abstract Get PDF

Figures&Tables (0)

References (38)

Paper Information

References(38)

[1] [1] G. Wu, J. Xu, E.J. Ng, W. Chen. MEMS resonators for frequency reference and timing applications. J. Microelectromechanical Syst., 29 (2020), pp. 1137-1166.10.1109/jmems.2020.3020787

[2] [2] J.T.M. Van Beek, R. Puers. A review of MEMS oscillators for frequency reference and timing applications. J. Micromech. Microeng., 22 (2011), Article 013001.10.1088/0960-1317/22/1/013001

[3] [3] W. Chen, W. Jia, Y. Xiao, Z. Feng, G. Wu. A temperature-stable and low impedance piezoelectric MEMS resonator for drop-in replacement of quartz crystals. IEEE Electron Device Lett., 42 (2021), pp. 1382-1385.10.1109/led.2021.3094319

[4] [4] R. Melamud, et al.. Temperature-insensitive composite micromechanical resonators. J. Microelectromechanical Syst., 18 (2009), pp. 1409-1419.10.1109/JMEMS.2009.2030074

[5] [5] Q. Xie, et al.. Effectiveness of oxide trench array as a passive temperature compensation structure in AlN-on-silicon micromechanical resonators. Appl. Phys. Lett., 110 (2017), Article 083501.10.1063/1.4976808

[6] [6] A. Jaakkola, M. Prunnila, T. Pensala, J. Dekker, P. Pekko. Design rules for temperature compensated degenerately n-type-doped silicon MEMS resonators. J. Microelectromechanical Syst., 24 (2015), pp. 1832-1839.10.1109/jmems.2015.2443379

[7] [7] J. Han, et al.. Temperature compensated bulk-mode capacitive MEMS resonators with ±16 ppm temperature stability over industrial temperature ranges. J. Microelectromechanical Syst., 31 (2022), pp. 723-725.10.1109/jmems.2022.3189202

[8] [8] G. Wu, et al.. Wafer-Level vacuum-packaged high-performance AlN-on-SOI piezoelectric resonator for sub-100-MHz oscillator applications. IEEE Trans. Ind. Electron., 65 (2018), pp. 3576-3584.10.1109/tie.2017.2748041

[9] [9] L.C. Ortiz, et al.. Low-power dual mode MEMS resonators with ppb stability over temperature. J. Microelectromechanical Syst., 29 (2020), pp. 190-201.10.1109/jmems.2020.2970609

[10] [10] C. Xu, J. Segovia-Fernandez, H.J. Kim, G. Piazza. Temperaturestable piezoelectric MEMS resonators using integrated ovens and simple resistive feedback circuits. J. Microelectromechanical Syst., 26 (2017), pp. 187-195.10.1109/jmems.2016.2626920

[11] [11] T.H. Lee, A. Hajimiri. Oscillator phase noise: a tutorial. IEEE J. Solid-State Circuits, 35 (2000), pp. 326-336.10.1109/4.826814

[12] [12] Y. Xiao, J. Han, K. Zhu, G. Wu. A piezoelectric mechanically coupled Lamé mode resonator with ultra-high Q. Appl. Phys. Lett., 122 (2023), p. 114101.10.1063/5.0141778

[13] [13] G. Pillai, S.-S. Li. Piezoelectric MEMS resonators: a review. IEEE Sens. J., 21 (2021), pp. 12589-12605.10.1109/jsen.2020.3039052

[14] [14] Z. Wu, M. Rais-Zadeh. A temperature-stable piezoelectric MEMS oscillator using a CMOS PLL circuit for temperature sensing and oven control. J. Microelectromechanical Syst., 24 (2015), pp. 1747-1758.10.1109/jmems.2015.2434832

[15] [15] W. Jia, W. Chen, Y. Xiao, Z. Wu, G. Wu. A micro-oven-controlled dual-mode piezoelectric MEMS resonator with ±400 PPB stability over –40 to 80 °C temperature range. IEEE Trans. Electron Devices, 69 (2022), pp. 2597-2603.10.1109/ted.2022.3159287

[16] [16] Y. Xiao, J. Han, K. Zhu, G. Wu. A micro-oven controlled dual-mode piezoelectric MEMS resonator with ±190 ppb stability over –40 to 105 °C temperature range. IEEE Trans. Electron Devices, 44 (2023), pp. 1340-1343.10.1109/LED.2023.3285622

[17] [17] M. Shahmohammadi, B.P. Harrington, R. Abdolvand. Turnover temperature point in extensional-mode highly doped silicon microresonators. IEEE Trans. Electron Devices, 60 (2013), pp. 1213-1220.10.1109/ted.2013.2243451

[18] [18] A. Frangi, M. Cremonesi, A. Jaakkola, T. Pensala. Analysis of anchor and interface losses in piezoelectric MEMS resonators. Sensor Actuat. A Phys., 190 (2013), pp. 127-135.10.1016/j.sna.2012.10.022

[19] [19] W. Chen, W. Jia, Y. Xiao, G. Wu. Design, modeling and characterization of high-performance bulk-mode piezoelectric MEMS resonators. J. Microelectromechanical Syst., 31 (2022), pp. 318-327.10.1109/jmems.2022.3159995

[20] [20] M.W.U. Siddiqi, P. Fedeli, C. Tu, A. Frangi, J.E.-Y. Lee. Numerical analysis of anchor loss and thermoelastic damping in piezoelectric AlN-on-Si Lamb wave resonators. J. Micromech. Microeng., 29 (2019), p. 105013.10.1088/1361-6439/ab392c

[21] [21] G.D. Vukasin, et al.. Anchor design affects dominant energy loss mechanism in a Lamé mode MEM resonator. J. Microelectromechanical Syst., 29 (2020), pp. 860-866.10.1109/jmems.2020.3012925

[22] [22] W. Chen, W. Jia, Y. Xiao, G. Wu. Anchor loss reduction for square-extensional mode MEMS resonator using tethers with auxiliary structures. IEEE Sens. J., 23 (2023), pp. 15454-15460.10.1109/jsen.2023.3282409

[23] [23] B.P. Harrington, R. Abdolvand. In-plane acoustic reflectors for reducing effective anchor loss in lateral-extensional MEMS resonators. J. Micromech. Microeng., 21 (2011), Article 085021.10.1088/0960-1317/21/8/085021

[24] [24] G. Wu, et al.. GHz spurious mode free AlN Lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers. Appl. Phys. Lett., 109 (2016), Article 013506.10.1063/1.4955410

[25] [25] F. Bao, et al.. Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals. Sensor Actuat. A Phys., 297 (2019), p. 111541.10.1016/j.sna.2019.111541

[26] [26] P. Qin, H. Zhu, J.E.-Y. Lee, Q. Xue. Phase noise reduction in a VHF MEMS-CMOS oscillator using phononic crystals. IEEE J. Electron Devices Soc., 4 (2016), pp. 149-154.10.1109/jeds.2016.2527045

[27] [27] N. Wang, et al.. Micromechanical resonators based on silicon two-dimensional phononic crystals of square lattice. J. Microelectromechanical Syst., 21 (2012), pp. 801-810.10.1109/jmems.2011.2174416

[28] [28] L. Binci, C. Tu, H. Zhu, J.E.-Y. Lee. Planar ring-shaped phononic crystal anchoring boundaries for enhancing the quality factor of Lamb mode resonators. Appl. Phys. Lett., 109 (2016), p. 203501.10.1063/1.4967794

[29] [29] R. Yang, Y. Zhang, J. Qian, J.E.-Y. Lee. Effect of phononic crystal orientation on AlN-on-silicon lamb wave micromechanical resonators. IEEE Sens. J., 22 (2022), pp. 16811-16819.10.1109/jsen.2022.3192088

[30] [30] S.A. Chandorkar, et al.. Limits of quality factor in bulk-mode micromechanical resonators. 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems (MEMS) (IEEE, 2008), pp. 74-77.10.1109/memsys.2008.4443596

[31] [31] A. Jaakkola, M. Prunnila, T. Pensala, J. dekker, P. Pekko. Determination of doping and temperature-dependent elastic constants of degenerately doped silicon from MEMS resonators. IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 61 (2014), pp. 1063-1074.10.1109/tuffc.2014.3007

[32] [32] S. Jiang, H. Hu, V. Laude. Low-frequency band gap in cross-like holey phononic crystal strip. J. Phys. D: Appl. Phys., 51 (2018), Article 045601.10.1088/1361-6463/aa9ec1

[34] [34] S. Mohammadi, A. Eftekhar, A. Khelif, W. Hunt, A. Adibi. Evidence of large high frequency complete phononic band gaps in silicon phononic crystal plates. Appl. Phys. Lett., 92 (2008), p. 221905.10.1063/1.2939097

[35] [35] M.W.U. Siddiqi, J.E.-Y. Lee. Wide acoustic bandgap solid disk-shaped phononic crystal anchoring boundaries for enhancing quality factor in AlN-on-Si MEMS resonators. Micromachines, 9 (2018), p. 1413.10.3390/mi9080413

[36] [36] Y. Tong, T. Han. Anchor loss reduction of Lamb wave resonator by pillar-based phononic crystal. Micromachines, 12 (2021), p. 62.10.3390/mi12010062

[37] [37] H. Zhu, J.E.-Y. Lee. AlN piezoelectric on silicon MEMS resonator with boosted Q using planar patterned phononic crystals on anchors. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (IEEE, 2015), pp. 797-800.10.1109/memsys.2015.7051079

[38] [38] G.K. Ho, R. Abdolvand, A. Sivapurapu, S. Humad, F. Ayazi. Piezoelectric-on-silicon lateral bulk acoustic wave micromechanical resonators. J. Microelectromechanical Syst., 17 (2008), pp. 510-520.10.1109/jmems.2007.906758

[39] [39] F.-H. Bao, et al.. Multi-stage phononic crystal structure for anchor-loss reduction of thin-film piezoelectric-on-silicon microelectromechanical-system resonator. Appl. Phys. Express, 11 (2018), Article 067201.

Tools

Get Citation

Copy Citation Text

Yuhao Xiao, Kewen Zhu, Jinzhao Han, Sheng Liu, Guoqiang Wu. Q-enhancement of piezoelectric micro-oven-controlled MEMS resonators using honeycomb lattice phononic crystals[J]. Chip, 2024, 3(4): 100108

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Research Articles

Received: Jul. 5, 2024

Accepted: Sep. 12, 2024

Published Online: Jan. 23, 2025

The Author Email: Wu Guoqiang (wuguoqiang@whu.edu.cn)

DOI:10.1016/j.chip.2024.100108

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology