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Chip, Volume. 3, Issue 4, 100108(2024)

Q-enhancement of piezoelectric micro-oven-controlled MEMS resonators using honeycomb lattice phononic crystals

Yuhao Xiao1... Kewen Zhu1, Jinzhao Han1, Sheng Liu1,2,3, and Guoqiang Wu1,23,* |Show fewer author(s)
Author Affiliations
  • 1Institute of Technological Sciences, Wuhan University, Wuhan 430072, China
  • 2Hubei Yangtze Memory Laboratories, Wuhan 430205, China
  • 3School of Microelectronics, Wuhan University, Wuhan 430072, China
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    Yuhao Xiao, Kewen Zhu, Jinzhao Han, Sheng Liu, Guoqiang Wu. Q-enhancement of piezoelectric micro-oven-controlled MEMS resonators using honeycomb lattice phononic crystals[J]. Chip, 2024, 3(4): 100108

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    Paper Information

    Category: Research Articles

    Received: Jul. 5, 2024

    Accepted: Sep. 12, 2024

    Published Online: Jan. 23, 2025

    The Author Email: Wu Guoqiang (wuguoqiang@whu.edu.cn)

    DOI:10.1016/j.chip.2024.100108

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology