Acta Photonica Sinica, Volume. 51, Issue 12, 1216001(2022)
Research on Improving the Uniformity of Optical Communication Filter Film by Ion Beam Etching
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Jing ZHANG, Haicheng LIU, Xiuhua FU, Shengqi WANG, Fei YANG. Research on Improving the Uniformity of Optical Communication Filter Film by Ion Beam Etching[J]. Acta Photonica Sinica, 2022, 51(12): 1216001
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Received: Mar. 25, 2022
Accepted: May. 17, 2022
Published Online: Feb. 6, 2023
The Author Email: LIU Haicheng (Liuhaicheng2022@163.com)