Acta Photonica Sinica, Volume. 51, Issue 12, 1216001(2022)

Research on Improving the Uniformity of Optical Communication Filter Film by Ion Beam Etching

Jing ZHANG1, Haicheng LIU1、*, Xiuhua FU1,2, Shengqi WANG3, and Fei YANG4
Author Affiliations
  • 1College of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China
  • 2Zhongshan Research Institute,Changchun University of Science and Technology,Zhongshan,Guangdong 528436,China
  • 3Guang Chi Technology(Shanghai)Co.,Ltd.,Shanghai 200444,China
  • 4Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China
  • show less
    References(15)

    [1] L SCHOLTZ, L LADANYI, J MULLEROVA. Interfacial roughness and temperature dependence of narrow band thin film filters for the DWDM passive optical networks. Advances in Electrical and Electronic Engineering, 14, 75-82(2016).

    [2] K SHTYRKOVA, I GASCHITS, D O CAPLAN. Narrowband optical filtering for background-limited photon-counting free-space optical communications, 109100F(2019).

    [3] Peng SHI, Gong ZHANG, Yushuai ZHANG et al. Research on high-performance optical communication bandpass filter film prepared by ion beam sputtering technology. Journal of Vacuum Science and Technology, 39, 136-139(2019).

    [4] Jinbao ZHANG, Minghui WANG, Hao GENG et al. Process technology for preparing narrow-band filter film system by time monitoring method. Journal of Shaanxi University of Science and Technology (Natural Science Edition), 35, 12-16(2019).

    [5] H TAKASHASHI. Temperature stability of thin-film narrow-bandpass filters produced by ion-assisted deposition. Applied Optics, 34, 667-675(1995).

    [6] Jinfa TANG, Peifu GU, Xu LIU et al. Modern optical thin film technology(2006).

    [7] Peifu GU, Wei LU, Haixing CHEN et al. Influence of spectral width of film thickness monitoring system on performance of narrow band filter. Acta Optics Sinica, 24, 251-254(2004).

    [8] Fang LI, Yongchang LIN. Design of ultra-narrowband optical filter applied to optical fiber communication DWDM system. Journal of Beijing Institute of Technology, 599-602(2001).

    [9] Xiaohui ZHANG, Xiaobing HAN. Optimal design of compensation film for narrowband filter film system for WDM optical fiber communication. Journal of Naval University of Engineering, 42-45(2003).

    [10] Peifu GU, Haixing CHEN, Wei LU et al. Central wavelength temperature stability of wavelength division multiplexing thin film bandpass filter. Acta Optics Sinica, 24, 33-36(2004).

    [11] Lingmao XU, Jizhou WANG, Kun LI et al. Research on improvement of evaporative coating substrate tooling and coating uniformity. Vacuum and Low Temperature, 27, 444-448(2021).

    [12] Boyang WEI, Dongmei LIU, Xiuhua FU et al. Study on film thickness uniformity of magnetron sputtering system based on twin targets. Acta Optics Sinica, 41, 222-228(2021).

    [13] J C HSU, C C LEE, C C KUO et al. Coating uniformity improvement for a dense-wavelength-division-multiplexing filter by use of the etching effect. Applied Optics, 44, 4402-4407(2005).

    [14] Dawei ZHANG, Ruijin HONG, Shuhai FAN et al. The role of ion beam density in ion-assisted deposition. Acta Photonica Sinica, 34, 477-480(2005).

    [15] Haolong TANG, Xiuhua FU, Guojun LIU et al. Development of low-loss optical filter for torpedo optical fiber guidance system. Acta Photonica Sinica, 42, 1289-1294(2013).

    Tools

    Get Citation

    Copy Citation Text

    Jing ZHANG, Haicheng LIU, Xiuhua FU, Shengqi WANG, Fei YANG. Research on Improving the Uniformity of Optical Communication Filter Film by Ion Beam Etching[J]. Acta Photonica Sinica, 2022, 51(12): 1216001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Mar. 25, 2022

    Accepted: May. 17, 2022

    Published Online: Feb. 6, 2023

    The Author Email: LIU Haicheng (Liuhaicheng2022@163.com)

    DOI:10.3788/gzxb20225112.1216001

    Topics