Laser & Optoelectronics Progress, Volume. 47, Issue 2, 22201(2010)

Development and Application of MEMS Deformable Mirror

Chen Lizi*, Guan Xiaowei, and Zhang Zheng
Author Affiliations
  • [in Chinese]
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    References(24)

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    Chen Lizi, Guan Xiaowei, Zhang Zheng. Development and Application of MEMS Deformable Mirror[J]. Laser & Optoelectronics Progress, 2010, 47(2): 22201

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    Paper Information

    Category: Reviews

    Received: Apr. 17, 2009

    Accepted: --

    Published Online: Jan. 29, 2010

    The Author Email: Lizi Chen (lzchen@yahoo.com.cn)

    DOI:10.3788/lop47.022201

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