Laser & Optoelectronics Progress, Volume. 47, Issue 2, 22201(2010)
Development and Application of MEMS Deformable Mirror
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Chen Lizi, Guan Xiaowei, Zhang Zheng. Development and Application of MEMS Deformable Mirror[J]. Laser & Optoelectronics Progress, 2010, 47(2): 22201
Paper Information
Category: Reviews
Received: Apr. 17, 2009
Accepted: --
Published Online: Jan. 29, 2010
The Author Email: Lizi Chen (lzchen@yahoo.com.cn)
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