Journal of Inorganic Materials, Volume. 37, Issue 6, 596(2022)

Columnar Nanograined BaTiO3 Ferroelectric Thin Films Integrated on Si with a Sizable Dielectric Tunability

Yuyao ZHAO1 and Jun OUYANG1,2、*
Author Affiliations
  • 11. Key Laboratory for Liquid-Solid Structure Evolution and Processing of Materials, School of Materials Science and Engineering, Shandong University, Jinan 250061, China
  • 22. School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, China
  • show less
    References(30)

    [3] P HARIBABU, P MAHESH, G T HWANG et al. High-performance dielectric ceramic films for energy storage capacitors: progress and outlook. Advanced Functional Materials, 18036(2018).

    [7] J Y ZHAO, H W CHEN, M WEI et al. Effects of Bi2O3, Sm2O3 content on the structure, dielectric properties and dielectric tunability of BaTiO3 ceramics. Journal of Materials Science, 19279-19288(2019).

    [13] A L SANGLE, O J LEE, A KURSUMOVIC et al. Very high commutation quality factor and dielectric tunability in nanocomposite SrTiO3 thin films with Tc enhanced to >300 ℃. Nanoscale, 2460-3468(2018).

    [20] K WANG, Y ZHANG, S X WANG et al. High energy performance ferroelectric (Ba,Sr)(Zr,Ti)O3 film capacitors integrated on Si at 400 ℃. ACS Applied Materials& Interface, 22717-22727(2021).

    [21] O MILTON. Materials Science of Thin Films. Academic Press(2002).

    [23] J G CHENG, X J MENG, J TANG et al. Effects of individual layer thickness on the structure and electrical properties of Sol-Gel- derived Ba0.8Sr0.2TiO3 thin films. Journal of the Ceramic Society, 2616-2618(2000).

    Tools

    Get Citation

    Copy Citation Text

    Yuyao ZHAO, Jun OUYANG. Columnar Nanograined BaTiO3 Ferroelectric Thin Films Integrated on Si with a Sizable Dielectric Tunability [J]. Journal of Inorganic Materials, 2022, 37(6): 596

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: RESEARCH ARTICLE

    Received: Jul. 13, 2021

    Accepted: --

    Published Online: Jan. 10, 2023

    The Author Email: OUYANG Jun (ouyangjun@qlu.edu.cn)

    DOI:10.15541/jim20210437

    Topics