<trans-title xml:lang="en">Columnar Nanograined BaTiO<sub>3</sub> Ferroelectric Thin Films Integrated on Si with a Sizable Dielectric Tunability </trans-title>

Yuyao ZHAO; Jun OUYANG

doi:10.15541/jim20210437

Journal of Inorganic Materials, Volume. 37, Issue 6, 596(2022)

Columnar Nanograined BaTiO₃ Ferroelectric Thin Films Integrated on Si with a Sizable Dielectric Tunability

Yuyao ZHAO¹ and Jun OUYANG^1,2、*

¹1. Key Laboratory for Liquid-Solid Structure Evolution and Processing of Materials, School of Materials Science and Engineering, Shandong University, Jinan 250061, China

²2. School of Chemistry and Chemical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, China

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Figures & Tables(4)

1. Phase structure analyses of BaTiO₃ films

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2. Nanostructures of BaTiO₃ films deposited at (a-c) 450 ℃ and (d-f) 500 ℃

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3. Electrical performance of BaTiO₃ films

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4. Dielectric tunability performance of the BaTiO₃ films

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Yuyao ZHAO, Jun OUYANG. Columnar Nanograined BaTiO₃ Ferroelectric Thin Films Integrated on Si with a Sizable Dielectric Tunability [J]. Journal of Inorganic Materials, 2022, 37(6): 596

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Paper Information

Category: RESEARCH ARTICLE

Received: Jul. 13, 2021

Accepted: --

Published Online: Jan. 10, 2023

The Author Email: OUYANG Jun (ouyangjun@qlu.edu.cn)

DOI:10.15541/jim20210437

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