Optics and Precision Engineering, Volume. 21, Issue 6, 1380(2013)
Stability of Mg/SiC, Mg/Co EUV multilayers
[1] [1] SPILLER E. High performance multilayer coatings for EUV lithography [J]. SPIE, 2004, 5193:89-97.
[2] [2] ATTWOOD D. Soft X-rays and EUV Radiation Principles and Applications [M]. NewYork: Cambridge University Press, 2000.
[3] [3] KORTRIGHT J B, RICE M, CARR R. Soft-X-ray Faraday rotation at Fe L2,3 edges [J]. Physical Review B, 1995, 51(15):10240-10244.
[4] [4] PLATONOV Y, BROADWAY D, DEGROOT B, et al.. Deposition of X-ray multilayers on long size substrates for synchrotron applications [J]. SPIE, 1997, 3152: 231-235.
[5] [5] WINDT D L, DONGUY S, SEELY J, et al.. EUV multilayers for solar physics [J]. SPIE, 2004, 5168: 1-11.
[6] [6] SUMAN M, MINAPELIZZO G M, WINDT D, et al.. Extreme-ultraviolet multilayer coatings with high spectral purity for solar imaging [J]. Appl. Opt., 2009, 48(29): 5432-5437.
[7] [7] ZHU J T, WANG Z S, ZHANG Z, et al.. High reflectance multilayer for He-II radiation at 30.4 nm [J]. Appl. Opt., 2008, 47:C310-C314.
[8] [8] PELIZZO M G, FINESCHI S, CORSO A J, et al.. Long-term stability of Mg/SiC multilayers [J]. Optical Engineering, 2012, 51(2):023801.
[9] [9] ZHU J T, HUANG Q SH, BAI L, et al.. Manufacture and measurement of SiC/Mg EUV multilayer mirrors in different base pressures [J]. Opt. Precision Eng., 2009, 17(12):2946-2951.(in Chinese)
[10] [10] ZHU J T, ZHOU S K, LI H C, et al.. Comparison of Mg-based multilayers for solar He-II radiation at 30.4 nm wavelength [J]. Appl. Opt., 2010, 49:3922-3925.
[11] [11] MAURY H, JONNARD P, LE GUEN K, et al.. Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayer [J]. Eur. Phys. J. B., 2008, 64:193-199.
[12] [12] ZHU J T, ZHOU S K, LI H C, et al.. Thermal stability of Mg/Co multilayer with B4C, Mo or Zr diffusion barrier layers [J]. Optics Express, 2011,19(22):21849-21854.
[13] [13] TAKENAKA H, ICHIMARU S, OHCHI T, et al.. Soft-X-ray reflectance and heat resistance of SiC/Mg multilayer [J]. J. of Electron Spectroscopy and Related Phenomena, 2005, 144-147:1047-1049.
[14] [14] EJIMA T, YAMAZAKI A, BANSE T, et al.. Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25-35 nm region [J]. Appl. Opt., 2005, 44(26):5446-5453.
[15] [15] HENKE B L,GULLIKSON E M,DAVIS J C.X-ray interactions:photo absorption,scattering ,transmission,and reflection at E=50-30 000 eV,Z=1-92[J].Atomic Data and Nuclear Data Table,1993,54(2):181-342.
[16] [16] ABRAMOFF M D, MAGELHAES P J, RAM S J. Image processing with Image [J]. Biophotonics International, 2004, 11(7):36-42.
[17] [17] ARDIZZONE S, BIANCHI C L, FADONI M, et al.. Magnesium salts and oxide: an XPS overview [J]. Applied Surface Science, 1997,119:253-259.
[18] [18] VINCENT C B. Handbook of Monochromatic XPS Spectra: The Elements and Native Oxides [M]. England: John Wiley & Sons, 2000.
[19] [19] SOUFLI R, NICA FERNNDEZ-PEREA M, BAKER S, et al.. Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings [J]. Appl. Phys. Lett., 2012,101(4):04311-1-5.
Get Citation
Copy Citation Text
ZHU Jing-tao, SONG Zhu-qing, DING Tao, MA Shuang, LI Hao-chuan. Stability of Mg/SiC, Mg/Co EUV multilayers[J]. Optics and Precision Engineering, 2013, 21(6): 1380
Category:
Received: Jan. 11, 2013
Accepted: --
Published Online: Jul. 1, 2013
The Author Email: Jing-tao ZHU (jtzhu@tongji.edu.cn)