Optics and Precision Engineering, Volume. 21, Issue 6, 1380(2013)

Stability of Mg/SiC, Mg/Co EUV multilayers

ZHU Jing-tao*... SONG Zhu-qing, DING Tao, MA Shuang and LI Hao-chuan |Show fewer author(s)
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    ZHU Jing-tao, SONG Zhu-qing, DING Tao, MA Shuang, LI Hao-chuan. Stability of Mg/SiC, Mg/Co EUV multilayers[J]. Optics and Precision Engineering, 2013, 21(6): 1380

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    Received: Jan. 11, 2013

    Accepted: --

    Published Online: Jul. 1, 2013

    The Author Email: Jing-tao ZHU (jtzhu@tongji.edu.cn)

    DOI:10.3788/ope.20132106.1380

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