Opto-Electronic Engineering, Volume. 37, Issue 2, 45(2010)

Multilayer Film Thickness Measurement Based on Genetic Simulated Annealing Algorithm

CHU Dong*... GONG Xing-zhi, CHENG Liang and YU Fei-hong |Show fewer author(s)
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    References(10)

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    [3] [3] MA Yuan-sheng,LIU Xu,GU Pei-fu,et al. Estimation of optical constants of thin film by the use of artificial neural networks [J]. Applied Optics(S0003-6935),1996,35(25):5035-5039.

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    CHU Dong, GONG Xing-zhi, CHENG Liang, YU Fei-hong. Multilayer Film Thickness Measurement Based on Genetic Simulated Annealing Algorithm[J]. Opto-Electronic Engineering, 2010, 37(2): 45

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    Paper Information

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    Received: Aug. 8, 2009

    Accepted: --

    Published Online: May. 28, 2010

    The Author Email: Dong CHU (chudonglj@gmail.com)

    DOI:10.3969/j.issn.1003-501x.2010.02.008

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