Opto-Electronic Engineering, Volume. 37, Issue 2, 45(2010)
Multilayer Film Thickness Measurement Based on Genetic Simulated Annealing Algorithm
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CHU Dong, GONG Xing-zhi, CHENG Liang, YU Fei-hong. Multilayer Film Thickness Measurement Based on Genetic Simulated Annealing Algorithm[J]. Opto-Electronic Engineering, 2010, 37(2): 45
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Received: Aug. 8, 2009
Accepted: --
Published Online: May. 28, 2010
The Author Email: Dong CHU (chudonglj@gmail.com)
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