Acta Photonica Sinica, Volume. 40, Issue 11, 1657(2011)
Raman Spectroscopic Study of the Crystallization of Intrinsic Amorphous Silicon Thin Films with a 488 nm Continuouswave Laser
Intrinsic amorphous silicon thin films were prepared by plasma enhanced chemical vapor deposition method,and the crystallization of the films by 488 nm and 514 nm continuouswave laser under different power densities and irradiation time were studied by microRaman spectroscopic measurements. It is shown that intrinsic amorphous silicon films are able to be crystallized within 60 s at laser power densities is above 1.575×105 W/cm2. When the power density reaches to 2.756×105 W/cm2, there is transformation from amorphous silicon to singlecrystalline silicon. With the increase of the laser power density, it is still singlecrystalline silicon. At the laser power density of 2.362 ×105 W/cm, 60 s irradiation time crystallized the effect is better; and at the power density of 2.756×105 W/cm2, the effect of crystallization with 488 nm wavelength is better than that of with 514 nm in 60 s, and they are all singlecrystalline silicon.
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DUAN Guoping, CHEN Junling, HAN Junhe, HUANG Mingju. Raman Spectroscopic Study of the Crystallization of Intrinsic Amorphous Silicon Thin Films with a 488 nm Continuouswave Laser[J]. Acta Photonica Sinica, 2011, 40(11): 1657
Received: Jul. 11, 2011
Accepted: --
Published Online: Dec. 12, 2011
The Author Email: Guoping DUAN (dgp2009@163.com)