Acta Photonica Sinica, Volume. 40, Issue 11, 1657(2011)

Raman Spectroscopic Study of the Crystallization of Intrinsic Amorphous Silicon Thin Films with a 488 nm Continuouswave Laser

DUAN Guoping1,2、*, CHEN Junling1,2, HAN Junhe1,2, and HUANG Mingju1,2
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  • 1[in Chinese]
  • 2[in Chinese]
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    Intrinsic amorphous silicon thin films were prepared by plasma enhanced chemical vapor deposition method,and the crystallization of the films by 488 nm and 514 nm continuouswave laser under different power densities and irradiation time were studied by microRaman spectroscopic measurements. It is shown that intrinsic amorphous silicon films are able to be crystallized within 60 s at laser power densities is above 1.575×105 W/cm2. When the power density reaches to 2.756×105 W/cm2, there is transformation from amorphous silicon to singlecrystalline silicon. With the increase of the laser power density, it is still singlecrystalline silicon. At the laser power density of 2.362 ×105 W/cm, 60 s irradiation time crystallized the effect is better; and at the power density of 2.756×105 W/cm2, the effect of crystallization with 488 nm wavelength is better than that of with 514 nm in 60 s, and they are all singlecrystalline silicon.

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    DUAN Guoping, CHEN Junling, HAN Junhe, HUANG Mingju. Raman Spectroscopic Study of the Crystallization of Intrinsic Amorphous Silicon Thin Films with a 488 nm Continuouswave Laser[J]. Acta Photonica Sinica, 2011, 40(11): 1657

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    Paper Information

    Received: Jul. 11, 2011

    Accepted: --

    Published Online: Dec. 12, 2011

    The Author Email: Guoping DUAN (dgp2009@163.com)

    DOI:10.3788/gzxb20114011.1657

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