Optoelectronics Letters, Volume. 10, Issue 1, 51(2014)
Fabrication of large-area nano-scale patterned sapphire substrate with laser interference lithography
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XUAN Ming-dong, DAI Long-gui, JIA Hai-qiang, CHEN Hong. Fabrication of large-area nano-scale patterned sapphire substrate with laser interference lithography[J]. Optoelectronics Letters, 2014, 10(1): 51
Received: Oct. 9, 2013
Accepted: --
Published Online: Oct. 12, 2017
The Author Email: Hong CHEN (hchen@aphy.iphy.ac.cn)