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Optoelectronics Letters, Volume. 10, Issue 1, 51(2014)

Fabrication of large-area nano-scale patterned sapphire substrate with laser interference lithography

Ming-dong XUAN, Long-gui DAI, Hai-qiang JIA, and Hong CHEN*
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  • Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
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    XUAN Ming-dong, DAI Long-gui, JIA Hai-qiang, CHEN Hong. Fabrication of large-area nano-scale patterned sapphire substrate with laser interference lithography[J]. Optoelectronics Letters, 2014, 10(1): 51

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    Paper Information

    Received: Oct. 9, 2013

    Accepted: --

    Published Online: Oct. 12, 2017

    The Author Email: Hong CHEN (hchen@aphy.iphy.ac.cn)

    DOI:10.1007/s11801-014-3188-6

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology