Piezoelectrics & Acoustooptics, Volume. 42, Issue 5, 674(2020)
Study on Ar+ Etching of Crystal-Ion-Sliced Lithium Niobite Single Crystal Thin Film
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FANG Yuanping, LUO Wenbo, HAO Xin, BAI Xiaoyuan, ZENG Huizong, SHUAI Yao, ZHANG Wanli. Study on Ar+ Etching of Crystal-Ion-Sliced Lithium Niobite Single Crystal Thin Film[J]. Piezoelectrics & Acoustooptics, 2020, 42(5): 674
Received: May. 24, 2020
Accepted: --
Published Online: Apr. 21, 2022
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