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Piezoelectrics & Acoustooptics, Volume. 42, Issue 5, 674(2020)

Study on Ar+ Etching of Crystal-Ion-Sliced Lithium Niobite Single Crystal Thin Film

FANG Yuanping1... LUO Wenbo1, HAO Xin2, BAI Xiaoyuan1, ZENG Huizong1, SHUAI Yao1 and ZHANG Wanli1 |Show fewer author(s)
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    FANG Yuanping, LUO Wenbo, HAO Xin, BAI Xiaoyuan, ZENG Huizong, SHUAI Yao, ZHANG Wanli. Study on Ar+ Etching of Crystal-Ion-Sliced Lithium Niobite Single Crystal Thin Film[J]. Piezoelectrics & Acoustooptics, 2020, 42(5): 674

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    Paper Information

    Received: May. 24, 2020

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2020.05.020

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology