[1] [1] BADAROGLU M, NG K, SALMANI M, et al.. More Moore landscape for system readiness-ITRS2.0 requirements［C］// Proceedings of 2014 IEEE 32nd International Conference on Computer Design (ICCD), October 19-22, 2014, Seoul, South Korea. New York, USA: IEEE, 2014: 147-152.

[2] [2] SCHIFT H. Nanoimprint lithography: 2D or not 2D? A review［J］. Applied Physics A, 2015, 121(2): 415-435.

[3] [3] YIN ZH SH, LI Y R, LI P Y, et al.. Research on error compensation algorithm for high precision 6-DOF laser measurement system ［J］. Journal of Electronic Measurement and Instrumentation, 2016, 30(8): 1275-1281. (in Chinese)

[4] [4] WANG L J, ZHANG M, ZHU Y, et al.. A displacement measurement system for ultra-precision heterodyne Littrow grating interferometer［J］. Opt. Precision Eng., 2017, 25(12): 2975-2985. (in Chinese)

[5] [5] WANG J. Research on 3-DOF Grating Interference Measurement Model of Mask Table ［D］. Harbin: Harbin Institute of Technology, 2017. (in Chinese)

[6] [6] JIN T, LIU J L, YANG W, et al.. High-precision straightness interferometer for linear moving stage ［J］. Opt. Precision Eng., 2018, 26(7): 1570-1577. (in Chinese)

[7] [7] XIA H J, HU M W, ZHANG X. High precision processing of quadrature signals for homodyne interferometer ［J］. Opt. Precision Eng., 2017, 25(9): 2309-2316. (in Chinese)

[8] [8] LEE J Y, CHEN H Y, HSU C C, et al.. Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution［J］. Sensors and Actuators A: Physical, 2007, 137(1): 185-191.

[9] [9] YOKOYAMA S, HORI Y, YOKOYAMA T, et al.. A heterodyne interferometer constructed in an integrated optics and its metrological evaluation of a picometre-order periodic error［J］. Precision Engineering, 2018, 54: 206-211.

[10] [10] FU H J, JI R D, HU P C, et al.. Measurement method for nonlinearity in heterodyne laser interferometers based on double-channel quadrature demodulation［J］. Sensors, 2018, 18(9): 2768.

[11] [11] TAN J B, HU P CH, XING X. Method and system for 2-DOF anti-optical-mixing heterodyne grating interferometry : 201310616950.2［P］. 2014-02-26.(in Chinese)

[12] [12] XING X, CHANG D, HU P C, et al.. Spatially separated heterodyne grating interferometer for eliminating periodic nonlinear errors［J］. Optics Express, 2017, 25(25): 31384-31393.

[13] [13] CHANG D, XING X, HU P C, et al.. Double-diffracted spatially separated heterodyne grating interferometer and analysis on its alignment tolerance［J］. Applied Sciences, 2019, 9(2): 263.

[14] [14] GUAN J, KCHERT P, WEICHERT C, et al.. A differential interferometric heterodyne encoder with 30 picometer periodic nonlinearity and sub-nanometer stability［J］. Precision Engineering, 2017, 50: 114-118.

[15] [15] HSIEH H L, CHEN J C, LERONDEL G, et al.. Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer［J］. Optics Express, 2011, 19(10): 9771-9782.

[16] [16] LI X H, SHI Y P, XIAO X, et al.. Design and testing of a compact optical prism module for multi-degree-of-freedom grating interferometry application［J］. Applied Sciences, 2018, 8(12): 2495.

[17] [17] WANG CH H, JI G J, HU X T, et al.. Polarization effect of cube-corner reflectors［J］. Acta Optica Sinica, 1993, 13(6): 540-545.(in Chinese)

[18] [18] GAO W H, WANG ZH Q, MU G G. Experimental study of wavefront sensors for increasing signal-to-noise ratios ［J］. Infrared and Laser Engineering, 2005, 34 (1): 58-61.(in Chinese)