Optics and Precision Engineering, Volume. 27, Issue 8, 1727(2019)
Spatially separated heterodyne grating interferometer for in-plane displacement measurement
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XING Xu, CHANG Di, HU Peng-cheng, TAN Jiu-bin. Spatially separated heterodyne grating interferometer for in-plane displacement measurement[J]. Optics and Precision Engineering, 2019, 27(8): 1727
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Received: Mar. 11, 2019
Accepted: --
Published Online: Jan. 19, 2020
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