Optics and Precision Engineering, Volume. 20, Issue 6, 1265(2012)

Feed-forward control of piezoelectric ceramic positioning stage

WANG Li1...2,3,*, RAO Chang-hui1,2, and RAO Xue-jun12 |Show fewer author(s)
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  • 1[in Chinese]
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  • 3[in Chinese]
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    References(13)

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    [3] [3] COLEMAN B D,HODGDON M L. A constitutive relation for rate independent hysteresis in ferromagnetically soft materials[J]. Int. J. of Engineering Science,1986,24(6):897-919.

    [4] [4] WANG D H,ZHU W. Hysteretic modeling and experimental verification for WTYD type piezoceramic micro-actuators[J]. Opt. Precision Eng.,2010,18(1):205-211.(in Chinese)

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    [9] [9] KUHNEN K,JANOCHA H. Inverse feedforward controller for complex hysteretic nonlinearities in smart-material systems[J]. Control Intell. Syst.,2001,29(3):74-83.

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    [2] FAN Mu-wen, HUANG Lin-hai, LI Mei, RAO Chang-hui. High-voltage drive and control for piezoelectric fast steering mirror[J]. Optics and Precision Engineering, 2015, 23(10): 2803

    [3] ZHAI Peng, XIAO Bo-han, HE Kai, ZHANG Kun. Composite backward control for GMA and its application in high precision machining of variable ellipse pinhole[J]. Optics and Precision Engineering, 2016, 24(6): 1389

    [4] MA Li, XIAO Jin-tao, ZHOU Sha-sha, SUN Li-ning. Linear lever-type piezoelectric inchworm actuator[J]. Optics and Precision Engineering, 2015, 23(1): 184

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    WANG Li, RAO Chang-hui, RAO Xue-jun. Feed-forward control of piezoelectric ceramic positioning stage[J]. Optics and Precision Engineering, 2012, 20(6): 1265

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    Paper Information

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    Received: Feb. 10, 2012

    Accepted: --

    Published Online: Jun. 25, 2012

    The Author Email: Li WANG (wangli9613@126.com)

    DOI:10.3788/ope.20122006.1265

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