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Optics and Precision Engineering, Volume. 20, Issue 6, 1265(2012)

Feed-forward control of piezoelectric ceramic positioning stage

WANG Li1...2,3,*, RAO Chang-hui1,2, and RAO Xue-jun12 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    WANG Li, RAO Chang-hui, RAO Xue-jun. Feed-forward control of piezoelectric ceramic positioning stage[J]. Optics and Precision Engineering, 2012, 20(6): 1265

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    Received: Feb. 10, 2012

    Accepted: --

    Published Online: Jun. 25, 2012

    The Author Email: Li WANG (wangli9613@126.com)

    DOI:10.3788/ope.20122006.1265

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology