Optics and Precision Engineering, Volume. 20, Issue 6, 1265(2012)
Feed-forward control of piezoelectric ceramic positioning stage
As the nonlinear hysteresis of a piezoelectric ceramic positioning stage affects its dynamic positioning precision badly, this paper proposes a model for the piezoelectric ceramic hysteresis based on a modified PI hysteresis model. In order to improve the dynamic positioning precision of the piezoelectric ceramic positioning stage based on traditional PID algorithm, the feed-forward control is constituted with the modified PI inverse hysteresis model and a traditional PID, and the experiments on slow speed and high speed positionings are performed. Experimental results show that the maximal error and mean error of the feed-forward controller are 40% and 20%-30% that of traditional PID algorithm for tracking single frequency trajectory.For multi-frequency trajectory tracking,the feed-forward controller has better dynamic control effect, and both maximal error and mean error are almost 33% that of traditional one.These data indicate the availability of the feed-forward control algorithm.
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WANG Li, RAO Chang-hui, RAO Xue-jun. Feed-forward control of piezoelectric ceramic positioning stage[J]. Optics and Precision Engineering, 2012, 20(6): 1265
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Received: Feb. 10, 2012
Accepted: --
Published Online: Jun. 25, 2012
The Author Email: Li WANG (wangli9613@126.com)