Detection of subsurface defects of fused silica optics by confocal scattering microscopy

Bin Ma; Zhengxiang Shen; Pengfei He; Yiqin Ji; Tian Sang; Huasong Liu; Dandan Liu; Zhanshan Wang

doi:10.3788/COL20100803.0296

Chinese Optics Letters, Volume. 8, Issue 3, 296(2010)

Detection of subsurface defects of fused silica optics by confocal scattering microscopy

Bin Ma^1,2,3, Zhengxiang Shen^1,3, Pengfei He², Yiqin Ji³, Tian Sang^1,4, Huasong Liu^1,3, Dandan Liu³, and Zhanshan Wang^1,3

Author Affiliations

¹Institute of Precision Optical Engineering, Tongji University, Shanghai 200092, China

²School of Aerospace Engineering and Applied Mechanics, Tongji University, Shanghai 200092, China

³Tianjin Key Laboratory of Optical Thin Films, Tianjin Jinhang Institute of Technical Physics, Tianjin 300192, China

⁴Department of Physics, Qiannan Normal College for Nationalities, Duyun 558000, China

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CLP Journals

[1] Shizhen Xu, Xiaotao Zu, Xiaodong Yuan. Localized CO2 laser treatment and post-heating process to reduce the growth coef f icient of fused silica surface damage[J]. Chinese Optics Letters, 2011, 9(6): 061405

Cited By

[1] Chang-Soo Kim, Hongki Yoo. Three-dimensional confocal reflectance microscopy for surface metrology. Measurement Science and Technology, 32, 102002(2021).

[2] I Abdul Rasheed, Swati Paul, Inder Mohan Chhabra, Mahender Kumar Gupta, P Manimaran, Karthikeyan Balasubramanian. Alumina abrasive grains mediated grinding induced glass surface and fractal analysis of SiO2 glass. Engineering Research Express, 3, 025042(2021).

[3] Jing-fei Yin, Qian Bai, Bi Zhang. Methods for Detection of Subsurface Damage: A Review. Chinese Journal of Mechanical Engineering, 31, 41(2018).

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Bin Ma, Zhengxiang Shen, Pengfei He, Yiqin Ji, Tian Sang, Huasong Liu, Dandan Liu, Zhanshan Wang. Detection of subsurface defects of fused silica optics by confocal scattering microscopy[J]. Chinese Optics Letters, 2010, 8(3): 296

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Paper Information

Received: Jun. 1, 2009

Accepted: --

Published Online: Mar. 11, 2010

The Author Email:

DOI:10.3788/COL20100803.0296

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology