Optics and Precision Engineering, Volume. 18, Issue 1, 94(2010)
Vacuum-ultraviolet blazed silicon grating anisotropically etched in KOH solution
[1] [1] CRISHAL J M, HARRINGTON A L. A selective etch for elemental silicon [J]. Electrochem. Soc. Extended Abstract, 1962,109:89.
[2] [2] TSANG W T, WANG S. Preferentially etched diffraction gratings in silicon [J]. J. Appl. Phys., 1975,46(5):2163-2166.
[3] [3] FUJII Y, AOYAMA K I, MINOWA J I. Optical demultiplexer using a silicon echelette grating [J]. IEEE J. Quantum Electron, 1980,QE-16:165-169.
[5] [5] ZHAO B, QI X D. Manufacturing for high efficient holographic diffraction gratings [J]. Opt. Precision Eng., 2001,9(2):109-114. (in Chinese)
[6] [6] FRANKE A E, SCHATTENBURG M L, GULLIKSON E M, et al.. Super-smooth X-ray reflection grating fabrication [J]. J. Vac. Sci. Technol. B, 1997,15(6):2940-2945.
[7] [7] CHANG C H, HEILMANN R K, FLEMING R C, et al.. Fabrication of sawtooth diffraction gratings using nanoimprint lithography [J]. J. Vac. Sci. Technol. B, 2003,21(6):2755-2759.
[8] [8] CHANG C H, MONTOYA J C, AKILIAN M, et al.. High fidelity blazed grating replication using nanoimprint lithography [J]. J. Vac. Sci. Technol. B,2004,22(6):3260-3264.
[11] [11] XU X D, ZHOU H J, HONG Y L, et al.. Photoresist-ashing technique used for fabrication synchrotron radiation blazed grating [J]. Microfabrication Technology, 2000(3):35-38. (in Chinese)
[12] [12] MORITA M, OHMI T, HASEGAWA E, et al.. Growth of native oxide on a silicon surface [J]. J. Appl. Phys. 1990,68(3):1272-1281.
[15] [15] SHENG B, XU X D, LIU Y, et al.. Vacuum-ultraviolet blazed silicon grating anisotropically etched by native-oxide mask [J]. Opt. Lett. 2009,34(8):1147-1149.
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SHENG Bin, XU Xiang-dong, LIU Ying, HONG Yi-lin, FU Shao-jun. Vacuum-ultraviolet blazed silicon grating anisotropically etched in KOH solution[J]. Optics and Precision Engineering, 2010, 18(1): 94
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Received: May. 25, 2009
Accepted: --
Published Online: Aug. 31, 2010
The Author Email: Bin SHENG (bsheng@ustc.edu.cn)
CSTR:32186.14.