Optics and Precision Engineering, Volume. 18, Issue 1, 94(2010)
Vacuum-ultraviolet blazed silicon grating anisotropically etched in KOH solution
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SHENG Bin, XU Xiang-dong, LIU Ying, HONG Yi-lin, FU Shao-jun. Vacuum-ultraviolet blazed silicon grating anisotropically etched in KOH solution[J]. Optics and Precision Engineering, 2010, 18(1): 94
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Received: May. 25, 2009
Accepted: --
Published Online: Aug. 31, 2010
The Author Email: Bin SHENG (bsheng@ustc.edu.cn)
CSTR:32186.14.
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