Chinese Optics Letters, Volume. 9, Issue 10, 101202(2011)

Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution

Chen-Tai Tan, Yuan-Sheng Chan, Jhao-An Chen, Teh-Chao Liao, and Ming-Hung Chiu
Author Affiliations
  • Department of Electro-Optical Engineering, National Formosa University, No. 64, Wunhua Road, Huwei, Yunlin 632, China
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