Chinese Optics Letters, Volume. 9, Issue 10, 101202(2011)
Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution
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Chen-Tai Tan, Yuan-Sheng Chan, Jhao-An Chen, Teh-Chao Liao, Ming-Hung Chiu. Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution[J]. Chinese Optics Letters, 2011, 9(10): 101202
Paper Information
Category: Instrumentation, measurement, and metrology
Received: Mar. 14, 2011
Accepted: Apr. 28, 2011
Published Online: Aug. 8, 2011
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