[1] Weiqian Zhao, Wenyu Li, Qi Zhao, et al. Surface measurement by randomly phase shifting interferometry of measured element. Optics and Precision Engineering, 24, 2167-2172(2016).

[2] Yun Ma, Lei Chen, Yiming Chen, et al. Reflective shearing point diffraction interferometer for phase defect measurement. Optics and Precision Engineering, 26, 2873-2880(2018).

[3] Hao Yan, Jun Long, Chiyue Liu, et al. Review of the development and application of deformation measurement based on digital holography and digital speckle interferometry. Infrared and Laser Engineering, 48, 0603010(2019).

[4] Yingjie Yu, Lin Chang, Ketao Yan, et al. Information separation of multi-surface based on wavelength phase shifting interferometry. Infrared and Laser Engineering, 49, 0303014(2020).

[5] G Schulz, J Schwider. Precise measurement of planeness. Applied Optics, 6, 1077-1084(1967).

[6] G Schulz, J Schwider, C Hiller, et al. Establishing an optical flatness standard. Applied Optics, 10, 929-934(1971).

[7] [7] Ai C, Wyant J C. Absolute testing of flats decomposed to even add function[C]Proceedings of SPIE, 1992, 1776: 7283.

[8] C J Evans, R N Kestner. Test optics error-removal. Applied Optics, 35, 1015-1021(1996).

[9] Li Yuan, Xiaohui Zhang. Surface shape measurement of large flat mirrors using a scanning pentaprism method. Chinese Optics, 12, 920-931(2019).

[10] Gongjing Yan, Wang Luo, Binzhi Zhang. High-precision surface reconstruction technology for elliptical flat mirrors. Chinese Optics, 14, 0106(2021).

[11] L Rayleigh. Interference bands and their-applications. Nature, 48, 212-214(1893).

[12] I Powell, E Goulet. Absolute figure measurements with a liquid-flat reference. Applied Optics, 37, 2579-2588(1998).

[13] [13] Geckeler R D. Err minimization in high accuracyscanning deflectometry[C] SPIE, 2006, 6293: 115.

[14] Erlong Miao, Dongqi Su, Shijun Peng. High precise absolute flat calibration. Laser & Optoelectronics Progress, 51, 051203(2014).

[15] S Chatterjee, Y P Kumar, R Singh, et al. Measurement of the surface form error of large aperture plane optical surfaces with a polarization phase-shifting liquid reference reflection Fizeau interfero- meter. Applied Optics, 55, 310-316(2016).

[16] [16] Quan Haiyang, Hou Xi, Wu Gaofeng, et al. Absolute interferometric testing of an ultraprecise flat substrate with a liquid mirr[C]SPIE, 2019, 11032: 110320.

[17] Jia Chen, Lei Chen, Chong Wang, et al. Research on the establishment of liquid reference based on dynamic interfero- meter. Optical Technique, 46, 1-6(2020).