Fig. 1. Natural state vector height of liquid

Fig. 2. (a) Schematic diagram of Φ300 mm Fizeau interferometer; (b) Φ300 mm Fizeau interferometer

Fig. 3. Ring point support structure

Fig. 4. (a) 10 cs silicone oil measurement result; (b) 100 cs silicone oil measurement result; (c) 1000 cs silicone oil measurement result

Fig. 5. (a) 2.0 mm measurement result; (b) 2.2 mm measurement result; (c) 2.4 mm measurement result; (d) 2.6 mm measurement result; (e) 2.8 mm measurement result; (f) 3.0 mm measurement result

Fig. 6. Repeatability of measurement results for different liquid thickness

Fig. 7. (a) 1.5 mm measurement result; (b) 1.8 mm measurement result

Fig. 8. (a) 350 mm cavity length measurement result; (b) 500 mm cavity length measurement result

Fig. 9. (a) 20.0 ℃ measurement result; (b) 20.1 ℃ measurement result

Fig. 10. (a) Temperature monitoring device; (b) Relationship between PV, RMS values and temperature

Fig. 11. (a) Φ400 mm liquid reference plane; (b) Reference flat crystal calibration process

Fig. 12. System error measured by Φ400 mm liquid reference plane

Fig. 13. (a) Φ450 mm liquid reference plane; (b) System error measured by Φ450 mm liquid reference plane

Fig. 14. System error measurement repeatability

Fig. 15. Residual wavefront