Infrared and Laser Engineering, Volume. 51, Issue 2, 20210880(2022)

System error calibration for Φ300 mm vertical Fizeau interferometer based on liquid reference

Zhiyao Ma, Lei Chen, Donghui Zheng*, Haiying Ma, Ruokun Li, Chen Huang, and Chenhui Hu
Author Affiliations
  • School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
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    Figures & Tables(15)
    Natural state vector height of liquid
    (a) Schematic diagram of Φ300 mm Fizeau interferometer; (b) Φ300 mm Fizeau interferometer
    Ring point support structure
    (a) 10 cs silicone oil measurement result; (b) 100 cs silicone oil measurement result; (c) 1000 cs silicone oil measurement result
    (a) 2.0 mm measurement result; (b) 2.2 mm measurement result; (c) 2.4 mm measurement result; (d) 2.6 mm measurement result; (e) 2.8 mm measurement result; (f) 3.0 mm measurement result
    Repeatability of measurement results for different liquid thickness
    (a) 1.5 mm measurement result; (b) 1.8 mm measurement result
    (a) 350 mm cavity length measurement result; (b) 500 mm cavity length measurement result
    (a) 20.0 ℃ measurement result; (b) 20.1 ℃ measurement result
    (a) Temperature monitoring device; (b) Relationship between PV, RMS values and temperature
    (a) Φ400 mm liquid reference plane; (b) Reference flat crystal calibration process
    System error measured by Φ400 mm liquid reference plane
    (a) Φ450 mm liquid reference plane; (b) System error measured by Φ450 mm liquid reference plane
    System error measurement repeatability
    Residual wavefront
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    Zhiyao Ma, Lei Chen, Donghui Zheng, Haiying Ma, Ruokun Li, Chen Huang, Chenhui Hu. System error calibration for Φ300 mm vertical Fizeau interferometer based on liquid reference[J]. Infrared and Laser Engineering, 2022, 51(2): 20210880

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    Paper Information

    Category: Special issue-Precision optical metrological testing

    Received: Nov. 24, 2021

    Accepted: Jan. 26, 2022

    Published Online: Mar. 21, 2022

    The Author Email: Zheng Donghui (zdonghui@njust.edu.cn)

    DOI:10.3788/IRLA20210880

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