[1] [1] Kamali SM, Arbabi E, Arbabi A, Faraon A. A review of dielectric optical metasurfaces for wavefront control. Nanophotonics. 2018;7(6):1041–1068.10.1515/nanoph-2017-0129

[2] [2] Duan H, Wang X, Luo X, Ou X, Li L, Chen Y, Yang P, Wang S, Duan H. All-dielectric metasurfaces for polarization manipulation: Principles and emerging applications. Nanophotonics. 2020;9(12):3755–3780.

[3] [3] Tanyi Ako R, Upadhyay A, Withayachumnankul W, Bhaskaran M, Sriram S. Dielectrics for terahertz metasurfaces: Material selection and fabrication techniques. Adv Opt Mater. 2020;8(3):Article 1900750.

[4] [4] Brener I, Liu S, Staude I, Valentine J, Holloway CL. Dielectric metamaterials: Fundamentals, designs, and applications. Cambridge (UK): Woodhead Publishing; 2019.

[5] [5] Khorasaninejad M, Capasso F. Broadband multifunctional efficient meta-gratings based on dielectric waveguide phase shifters. Nano Lett. 2015;15(10):6709–6715.10.1021/acs.nanolett.5b02524

[6] [6] Arbabi A, Horie Y, Bagheri M, Faraon A. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission. Nat Nanotechnol. 2015;10(11):937–943.10.1038/nnano.2015.186

[7] [7] Staude I, Schilling J. Metamaterial-inspired silicon nanophotonics. Nat Photonics. 2017;11(5):274–284.10.1038/nphoton.2017.39

[8] [8] Kamali SM, Arbabi E, Arbabi A, Horie Y, Faraon A. Highly tunable elastic dielectric metasurface lenses. Laser Photonics Rev. 2016;10(6):1002–1008.10.1002/lpor.201600144

[9] [9] Arbabi A, Horie Y, Ball AJ, Bagheri M, Faraon A. Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays. Nat Commun. 2015;6(1):Article 7069.

[10] [10] Chantakit T, Schlickriede C, Sain B, Meyer F, Weiss T, Chattham N, Zentgraf T. All-dielectric silicon metalens for two-dimensional particle manipulation in optical tweezers. Photonics Res. 2020;8(9):1435–1440.

[11] [11] Kamali SM, Arbabi A, Arbabi E, Horie Y, Faraon A. Decoupling optical function and geometrical form using conformal flexible dielectric metasurfaces. Nat Commun. 2016;7(1):Article 11618.

[12] [12] Khorasaninejad M, Zhu AY, Roques-Carmes C, Chen WT, Oh J, Mishra I, Devlin RC, Capasso F. Polarization-insensitive metalenses at visible wavelengths. Nano Lett. 2016;16(11):7229–7234.10.1021/acs.nanolett.6b03626

[13] [13] Khorasaninejad M, Ambrosio A, Kanhaiya P, Capasso F. Broadband and chiral binary dielectric meta-holograms. Sci Adv. 2016;2(5):Article e1501258.

[14] [14] Overvig AC, Shrestha S, Malek SC, Lu M, Stein A, Zheng C, Yu N. Dielectric metasurfaces for complete and independent control of the optical amplitude and phase. Light Sci Appl. 2019;8(1):Article 92.

[15] [15] Chong KE, Staude I, James A, Dominguez J, Liu S, Campione S,Subramania GS, Luk TS, Decker M, Neshev DN, et al. Polarization-independent silicon metadevices for efficient optical wavefront control. Nano Lett. 2015;15(8):5369–5374.10.1021/acs.nanolett.5b01752

[16] [16] Aoni RA, Rahmani M, Xu L, Kamali KZ, Komar A, Yan J, Neshev D, Miroshnichenko AE. High-efficiency visible light manipulation using dielectric metasurfaces. Sci Rep. 2019;9(1):Article 6510.

[17] [17] Sell D, Yang J, Doshay S, Yang R, Fan JA. Large-angle, multifunctional metagratings based on freeform multimode geometries. Nano Lett. 2017;17(6):3752–3757.

[18] [18] Zi J, Xu Q, Wang Q, Tian C, Li Y, Zhang X, Han J, Zhang W. Antireflection-assisted all-dielectric terahertz metamaterial polarization converter. Appl Phys Lett. 2018;113(10):Article 101104.

[19] [19] Dong Y, Xu Z, Li N, Tong J, Fu YH, Zhou Y, Hu T, Zhong Q, Bliznetsov V, Zhu S, et al. Si metasurface half-wave plates demonstrated on a 12-inch CMOS platform. Nanophotonics. 2019;9(1):149–157.10.1515/nanoph-2019-0364

[20] [20] Zhang H, Zhang X, Xu Q, Tian C, Wang Q, Xu Y, Li Y, Gu J, Tian Z, Ouyang C, et al. High-efficiency dielectric metasurfaces for polarization-dependent terahertz wavefront manipulation. Adv Opt Mater. 2018;6(1):Article 1700773.

[21] [21] Xu Z, Dong Y, Tseng C-K, Hu T, Tong J, Zhong Q, Li N, Sim L, Lai KH, Lin Y, et al. CMOS-compatible all-Si metasurface polarizing bandpass filters on 12-inch wafers. Opt Express. 2019;27(18):26060–26069.

[22] [22] He Y, Wang L, Wu T, Wu Z, Chen Y, Yin K. Facile fabrication of hierarchical textures for substrate-independent and durable superhydrophobic surfaces. Nanoscale. 2022;14:9392–9400.

[23] [23] Zhang H, Zhang X, Xu Q, Wang Q, Xu Y, Wei M, Li Y, Gu J, Tian Z, Ouyang C, et al. Polarization-independent all-silicon dielectric metasurfaces in the terahertz regime. Photonics Res. 2018;6(1):24–29.10.1364/PRJ.6.000024

[24] [24] Dharmavarapu R, Izumi K, Katayama I, Ng SH, Vongsvivut J, Tobin MJ, Kuchmizhak A, Nishijima Y, Bhattacharya S, Juodkazis S. Dielectric cross-shaped-resonator-based metasurface for vortex beam generation at mid-IR and THz wavelengths. Nanophotonics. 2019;8(7):1263–1270.10.1515/nanoph-2019-0112

[25] [25] Wu T, Zhang X, Xu Q, Plum E, Chen K, Xu Y, Lu Y, Zhang H, Zhang Z, Chen X, et al. Dielectric metasurfaces for complete control of phase, amplitude, and polarization. Adv Opt Mater. 2022;10(1):Article 2101223.

[26] [26] Minkevičius L, Indrišiūnas S, Šniaukas R, Voisiat B, Janonis V, Tamošiūnas V, Kašalynas I, Račiukaitis G, Valušis G. Terahertz multilevel phase Fresnel lenses fabricated by laser patterning of silicon. Opt Lett. 2017;42(10):1875–1878.

[27] [27] Liu M, Fan Q, Yu LE, Xu AT. Polarization-independent infrared micro-lens array based on all-silicon metasurfaces. Opt Express. 2019;27(8):10738–10744.10.1364/OE.27.010738

[28] [28] Zhu Y, Zhoua S, Wang Z, Pu X, Cao X, Yu Y, Yuan W, Liu W. High-efficiency all-silicon metasurfaces with 2π phase control based on multiple resonators. Results Phys. 2021;29:Article 104765.

[29] [29] Zografopoulos DC, Ferraro A, Algorri JF, Martín-Mateos P, García-Cámara B, Moreno-Oyervides A, Krozer V, Acedo P, Vergaz R, Sánchez-Pena JM, et al. All-dielectric silicon metasurface with strong subterahertz toroidal dipole resonance. Adv Opt Mater. 2019;7(19):Article 1900777.

[30] [30] Kenney M, Li S, Zhang X, Su X, Kim TT, Wang D, Wu D, Ouyang C, Han J, Zhang W, et al. Pancharatnam-berry phase induced spin-selective transmission in herringbone dielectric metamaterials. Adv Mater. 2016;28(43):9567–9572.10.1002/adma.201603460

[31] [31] Huang J, Jiang L, Li X, Wang A, Wang Z, Wang Q, Hu J, Qu L, Cui T, Lu Y. Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification. Nanophotonics. 2019;8(5):869–878.

[32] [32] Li X, Xie Q, Jiang L, Han W, Wang Q, Wang A, Hu J, Lu Y. Controllable Si (100) micro/nanostructures by chemical-etching-assisted femtosecond laser single-pulse irradiation. Appl Phys Lett. 2017;110(18):Article 181907.

[33] [33] Kiani A, Venkatakrishnan K, Tan B. Micro/nano scale amorphization of silicon by femtosecond laser irradiation. Opt Express. 2009;17(19):16518–16526.

[34] [34] Chen F, Yang Q, Chen F, Meng X, Bian H, Yong J, Shan C, Hou X. Fabrication of large-area concave microlens array on silicon by femtosecond laser micromachining. Opt Lett. 2015;40(9):1928–1931.

[35] [35] Fan Y, Han P, Liang P, Xing Y, Ye Z, Hu S. Differences in etching characteristics of TMAH and KOH on preparing inverted pyramids for silicon solar cells. Appl Surf Sci. 2013;264:761–766.

[36] [36] Palik ED. Handbook of optical constants of solids. Cambridge (MA): Elsevier Inc.; 2012.

[37] [37] Lepeshov S, Kivshar Y. Near-field coupling effects in Mie-resonant photonic structures and all-dielectric metasurfaces. ACS Photonics. 2018;5(7):2888–2894.

[38] [38] Kivshar Y, Roberts AP. Classical and exotic magnetism: Recent advances and perspectives. Low Temp Phys. 2017;43(8):895–900.

[39] [39] Tuz VR, Yu P, Dmitriev V, Kivshar YS. Magnetic dipole ordering in resonant dielectric metasurfaces. Phys Rev Appl. 2020;13(4):Article 044003.

[40] [40] Miroshnichenko AE, Filonov D, Lukyanchuk B, Kivshar Y. Antiferromagnetic order in hybrid electromagnetic metamaterials. New J Phys. 2017;19(8):Article 083013.

[41] [41] Miroshnichenko AE, Lukyanchuk B, Maier SA, Kivshar YS. Optically induced interaction of magnetic moments in hybrid metamaterials. ACS Nano. 2012;6(1):837–842.10.1021/nn204348j