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Optics and Precision Engineering, Volume. 23, Issue 8, 2143(2015)

Automatic balancing of wavefront aberrations in high-numerical aperture lithographic lenses

XU Ming-fei1,2、* and HUANG Wei1
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  • 1[in Chinese]
  • 2[in Chinese]
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    XU Ming-fei, HUANG Wei. Automatic balancing of wavefront aberrations in high-numerical aperture lithographic lenses[J]. Optics and Precision Engineering, 2015, 23(8): 2143

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    Paper Information

    Received: Oct. 9, 2014

    Accepted: --

    Published Online: Oct. 22, 2015

    The Author Email: Ming-fei XU (stone870914@163.com)

    DOI:10.3788/ope.20152308.2143

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology