[1] H YNAMAZAKI, T SAIDA et al. Dual carrier dual-polarization IQ modulator using complementary frequency shifter. IEEE Selected Topics on Quantum Electronics, 19, 3400208(2013).

[2] A S LIU, R JOHNS, L LIAO et al. A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor. Nature, 427, 615-620(2004).

[3] H P SHANG, D G SUN, P YU et al. Investigation for sidewall roughness caused optical scattering loss of silicon-on-insulator waveguides with confocal laser scanning microscopy. Coatings, 10, 236(2020).

[4] F P PAYNE, J P R LACEY. A theoretical analysis of scattering loss from planar optical waveguides. Optical and Quantum Electronics, 26, 977-986(1994).

[5] T BARWICZ, H A HAUS. Three-dimensional analysis of scattering loss due to sidewall roughness in micro photonic waveguides. IEEE Lightwwave Technology, 23, 2719-2732(2005).

[6] C G POULTON, C KOOS, M FUJII et al. Radiation models and roughness loss in high index-contrast waveguides. IEEE Selected Topics on Quantum Electronics, 12, 1306-1321(2007).

[7] J H SCHMID, A DELÂGE, B LAMONTAGNE et al. Interference effect in scattering loss of high-index-contrast planar waveguides caused by boundary reflections. Optics Letters, 33, 1479-1481(2008).

[8] A DELÂGE, J LAPOINTE et al. Correlation of scattering loss， sidewall roughness and waveguide width in silicon-on-insulator （SOI） ridge waveguides. IEEE Journal of Lightwave Technology, 27, 3999-4008(2009).

[9] D G SUN, H P SHANG, H L JIANG et al. Effective metrology and standard of the surface roughness of micro/nanoscale waveguides with confocal laser scanning microscopy. Optics Letters, 44, 747-750(2019).

[10] H P SHANG, D G SUN, Q Y SUN et al. Analysis for system errors in measuring sidewall angle of silica waveguides with confocal laser scanning microscope （CLSM）. Measurement Science and Technology, 30, 025004(2019).

[11] C R DOERR, K OKAMOTO. Planar lightwave circuits in fiber-optic communications. Optical Fiber Telecommunications, 269-341(2008).

[12] E J MURPHY. Optical circuits and components： design and applications(1999).

[13] C FEUCHTER T THIRSTRUP. High precision planar waveguide propagation loss measurement technique using a Fabry-Perot cavity. IEEE Photonics Technology Letters, 6, 1244-1247(1994).

[14] V A VLASOV, S J MCNAB. Losses in single-mode silicon-on-insulator strip waveguides and bends. Optics Express, 12, 1622-1631(2004).

[15] F BOEUF, S CREMER, E TEMPORITI. Silicon photonic R&D and manufacturing on 300-mm wafer platform. IEEE Lightwave Technology, 33, 286-295(2016).