[1] YNAMAZAKI H, SAIDA T et al. Dual carrier dual-polarization IQ modulator using complementary frequency shifter[J]. IEEE Selected Topics on Quantum Electronics, 19, 3400208(2013).

[2] LIU A S, JOHNS R, LIAO L et al. A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor[J]. Nature, 427, 615-620(2004).

[3] SHANG H P, SUN D G, YU P et al. Investigation for sidewall roughness caused optical scattering loss of silicon-on-insulator waveguides with confocal laser scanning microscopy[J]. Coatings, 10, 236(2020).

[4] PAYNE F P, LACEY J P R. A theoretical analysis of scattering loss from planar optical waveguides[J]. Optical and Quantum Electronics, 26, 977-986(1994).

[5] BARWICZ T, HAUS H A. Three-dimensional analysis of scattering loss due to sidewall roughness in micro photonic waveguides[J]. IEEE Lightwwave Technology, 23, 2719-2732(2005).

[6] POULTON C G, KOOS C, FUJII M et al. Radiation models and roughness loss in high index-contrast waveguides[J]. IEEE Selected Topics on Quantum Electronics, 12, 1306-1321(2007).

[7] SCHMID J H, DELÂGE A, LAMONTAGNE B et al. Interference effect in scattering loss of high-index-contrast planar waveguides caused by boundary reflections[J]. Optics Letters, 33, 1479-1481(2008).

[8] DELÂGE A, LAPOINTE J et al. Correlation of scattering loss， sidewall roughness and waveguide width in silicon-on-insulator （SOI） ridge waveguides[J]. IEEE Journal of Lightwave Technology, 27, 3999-4008(2009).

[9] SUN D G, SHANG H P, JIANG H L et al. Effective metrology and standard of the surface roughness of micro/nanoscale waveguides with confocal laser scanning microscopy[J]. Optics Letters, 44, 747-750(2019).

[10] SHANG H P, SUN D G, SUN Q Y et al. Analysis for system errors in measuring sidewall angle of silica waveguides with confocal laser scanning microscope （CLSM）[J]. Measurement Science and Technology, 30, 025004(2019).

[11] DOERR C R, OKAMOTO K. Planar lightwave circuits in fiber-optic communications[J]. Optical Fiber Telecommunications, 269-341(2008).

[12] MURPHY E J[M]. Optical circuits and components： design and applications(1999).

[13] FEUCHTER T THIRSTRUP C. High precision planar waveguide propagation loss measurement technique using a Fabry-Perot cavity[J]. IEEE Photonics Technology Letters, 6, 1244-1247(1994).

[14] VLASOV V A, MCNAB S J. Losses in single-mode silicon-on-insulator strip waveguides and bends[J]. Optics Express, 12, 1622-1631(2004).

[15] BOEUF F, CREMER S, TEMPORITI E. Silicon photonic R&D and manufacturing on 300-mm wafer platform[J]. IEEE Lightwave Technology, 33, 286-295(2016).