Optics and Precision Engineering, Volume. 17, Issue 4, 839(2009)
Influence factors of line edge roughness measured by AFM
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ZHAO Xue-zeng, LI Ning, ZHOU Fa-quan, Li Hong-bo. Influence factors of line edge roughness measured by AFM[J]. Optics and Precision Engineering, 2009, 17(4): 839
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Received: Jun. 20, 2008
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: Xue-zeng ZHAO (zhaoxz@hope.hit.edu.cn)
CSTR:32186.14.
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