[1] [1] HUANG Y F, CHATTOPADHYAY S, JEN Y J, et al. Improved broadband and quasiomnidirectional antireflection properties with biomimetic silicon nanostructures［J］. Nature Nanotechnology, 2007, 2(12): 770-774.

[2] [2] TULL B R, CAREY J E, MAZUR E, et al. Silicon surface morphologies after femtosecond laser irradiation［J］. Mrs Bulletin, 2006, 31(8): 626-633.

[3] [3] SHEN M Y, CROUCH C H, CAREY J E, et al. Femtosecond laserinduced formation of submicrometer spikes on silicon in water［J］. Applied Physics Letters, 2004, 85(23): 5694-5696.

[4] [4] SHEN M Y, CROUCH C H, CAREY J E, et al. Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask［J］. Applied Physics Letters, 2003, 82(11): 1715-1717.

[5] [5] IMAMOTO H, KANEHIRA S, WANG X, et al. Fabrication and characterization of silicon antireflection structures for infrared rays using a femtosecond laser［J］. Optics Letters, 2011, 36(7): 1176-1178.

[6] [6] HAYASAKI Y, NISHITANI M, TAKAHASHI H, et al. Experimental investigation of the closest parallel pulses in holographic femtosecond laser processing［J］. Applied. Physics. A: Materials Science and Processing, 2012, 107(2): 357-362.

[7] [7] ZHANG Heng, ZHOU Yun, ZHOU Lei, et al. Fabrication of micrograting structures by nanosecond laser ablation of chrome film on glass substrate［J］. Acta Photonica Sinica, 2009, 38(2): 241-244.

[8] [8] SI J H, QIU J R, ZHAI J F. Photoinduced permanent gratings inside bulkazodyedoped polymers by the coherent field of a femtosecond laser［J］. Applied Physics Letters, 2002, 80(3): 359-361.

[9] [9] LI Xiang, PANG Zhaoguang, ZHANG Xingping. Fabrication of largearea gold nanowires grating［J］. Acta Photonica Sinica, 2011, 40(12): 1850-1854.

[10] [10] JIA X, JIA T Q, DING L E, et al. Complex periodic micro/nanostructures on 6HSiC crystal induced by the interference of three femtosecond laser beams［J］. Optics Letters, 2009, 34(6): 788-790.

[11] [11] SUN Huiting, SONG Zhengxun, WENG Zhankun, et al. Fabrication of twodimensional photonic crystal structure with defect by holographic lithography and twophoton polymerization［J］. Acta Photonica Sinica, 2011, 40(z1): 1-6.

[12] [12] KONDO T, MATSUO S, JUODKAZIS S, et al. Femtosecond laser interference technique with diffractive beam splitter for fabrication of threedimensional photonic crystals［J］. Applied Physics Letters, 2001, 79(6): 725-727.

[13] [13] LEI M, YAO B L, RUPP R A. Structuring by multibeam interference using symmetric pyramids［J］. Optics Express, 2006, 14(12): 5803-5811.

[14] [14] ESCUTI M J, CRAWFORD G P. Holographic photonic crystals［J］. Optical Engineering, 2004, 43(9): 19731987.