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Acta Photonica Sinica, Volume. 42, Issue 5, 515(2013)

Femtosecond Laser Multibeam Interference Lithography Antireflective Microstructure on Silicon Surface

HE Fengtao1,*... ZHOU Qiang1,2, YANG Wenzheng3, LONG Xuewen2, BAI Jing2 and CHENG Guanghua2 |Show fewer author(s)
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  • 1[in Chinese]
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    HE Fengtao, ZHOU Qiang, YANG Wenzheng, LONG Xuewen, BAI Jing, CHENG Guanghua. Femtosecond Laser Multibeam Interference Lithography Antireflective Microstructure on Silicon Surface[J]. Acta Photonica Sinica, 2013, 42(5): 515

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    Paper Information

    Received: Dec. 14, 2012

    Accepted: --

    Published Online: May. 22, 2013

    The Author Email: Fengtao HE (hefengtao@xupt.edu.cn)

    DOI:10.3788/gzxb20134205.0515

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology