Infrared and Laser Engineering, Volume. 51, Issue 3, 20210941(2022)

2560×2048 short-wave infrared InGaAs focal plane detector (Invited)

Chunlei Yu1...2, Haimei Gong1,2,*, Xue Li1,2,*, Songlei Huang1,2, Bo Yang1,2, Xianliang Zhu1,2, Xiumei Shao1,2, Tao Li1,2, and Yi Gu12 |Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of Sensor Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
  • 2Key Laboratory of Infrared Imaging Materials and Devices, Chinese Academy of Sciences, Shanghai 200083, China
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    References(10)

    [1] K P Judd, J M Nichols, J G Howard, et al. Passive shortwave infrared broadband and hyperspectral imaging in a maritime environment. Optical Engineering, 51, 3202(2012).

    [2] [2] Macdougal M, Hood A, Geske J, et al. InGaAs focal plane arrays f lowlightlevel SWIR imaging[C]Proceedings of SPIE, 2011, 8012: 801221.

    [3] [3] Battaglia J, Blessinger M, Enriquez M, et al. An uncooled 1280×1024 InGaAs focal plane array f small platfm, shtwave infrared imaging[C]Proceedings of SPIE, 2009, 7298: 72983 C.

    [4] [4] Yuan H, resen B F, Fulop G F, et al. FPA development: From InGaAs, InSb, to HgCdTe[C]Proceedings of SPIE, 2008, 6940: 69403 C.

    [5] [5] John Liobe, Michael Daugherty, Paul Bereznycky, et al. Ultralarge fmat, ultrasmall pixel pitch extended response visible through shtwave infrared (SWIR) camera[C]Proceedings of SPIE, 2019, 11002,

    [6] [6] Ma S, Matsumoto R, Saito S, et al. Highdefinition visibleSWIR InGaAs image sens using CuCu bonding of IIIV to silicon wafer[C]2019 IEEE International Electron Devices Meeting (IEDM). IEEE, 2019.

    [7] [7] Macdougal M H, Hood A, Geske J, et al. Small pixel VGA SWIR cameras f laser sensing (Conference Presentation)[C]Proceedings of SPIE, 2020, 11407: 1140703.

    [8] Xue Li, Xiumei Shao, Tao Li, et al. Developments of short-wave infrared InGaAs focal plane detectors. Infrared and Laser Engineering, 49, 0103006(2020).

    [9] Xiumei Shao, Haimei Gong, Xue Li, et al. Developments of high performance short-wave infrared InGaAs focal plane detectors. Infrared Technology, 38, 629-635(2016).

    [10] [10] Ma Yingjie, Zhu Xianliang, Yang Bo, et al. Fabrication of highlyunifm indium ball bumps f small unitcell infrared focal plane arrays[C]Conference on Infrared Device Infrared Technology, 2020.

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    Chunlei Yu, Haimei Gong, Xue Li, Songlei Huang, Bo Yang, Xianliang Zhu, Xiumei Shao, Tao Li, Yi Gu. 2560×2048 short-wave infrared InGaAs focal plane detector (Invited)[J]. Infrared and Laser Engineering, 2022, 51(3): 20210941

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    Paper Information

    Category: Invited paper

    Received: Dec. 9, 2021

    Accepted: Feb. 24, 2022

    Published Online: Apr. 8, 2022

    The Author Email: Gong Haimei (hmgong@mail.sitp.ac.cn), Li Xue (lixue@mail.sitp.ac.cn)

    DOI:10.3788/IRLA20210941

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