[1] [1] Jia Lide, Zheng Ziwen, Dai Yifan, et al. Principle and experiments of swing arm profilometer[J]. Opt Precision Eng, 2007, 15(4): 499-504. (in Chinese)

[2] [2] Yang Zhen, Li Guangyun, He Lei. Measurement methods and precision analysis of optical collimation[J]. Infrared and Laser Engineering, 2011, 40(2): 282-286. (in Chinese)

[3] [3] Ding Xiaokun, Liu Tiegen, Song Dianyou. Impact of accuracy of laser spot quality in laser triangulation long-term continuous measuring based on PSD[J]. Chinese J Lasers, 2012, 39(2): 0208006. (in Chinese)

[4] [4] Ma Xiaojun, Gao Dangzhong, Yang Mengsheng, et al. Measurement of thickness of metal thin film by using chromatic confocal spectral technology[J]. Opt Precision Eng, 2011, 19(1): 17-22. (in Chinese)

[5] [5] Dong Jingtao. Sensitivity analysis of thin-film thickness measurement by vertical scanning white light interferometry[J]. Appl Opt, 2013, 51(23): 5668-5675.

[6] [6] Paul K Upputuri, Li Gong, Wang Haifeng. Measurement of large discontinuities using single white light interferogram[J]. Opt Express, 2014, 22(22): 27373-27380.

[7] [7] Young-Sik Ghim, Angela Davies. Complete fringe order determination in scanning white-light interferometry using a Fourier-based technique[J]. Appl Opt, 2012, 51(12): 1922-1928.

[8] [8] Schnell U, Zimmermann E, Dandliker R. Absolute distance measurement with synchronously sampled white-light channeled spectrum interferometry[J]. Pure Appl Opt, 1995, 4: 643-651.

[9] [9] Igro Gurov, Petr Hlubina, Vladimir Chugunov. Evaluation of spectral modulated interferograms using a Fourier transform and the iterative phase-locked loop method[J]. Meas Sci Technol, 2003, 14: 122-130.

[10] [10] Xue Hui, Shen Weidong, Gu Peifu, et al. Thickness measurement of thin film based on white-light spectral interferometer[J]. Acta Optica Sinica, 2009, 29(7): 1877-1880.

[11] [11] Debnath S K, Kothiyal M P, Kim S W. Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques[J]. Opt Lasers Eng, 2009, 47(11): 1125-1130.

[12] [12] Soonyang Kwon. Critical dimension measurement of transparent film layers by multispectral imaging[J]. Opt Exp, 2014, 22(14): 17370-17381.

[13] [13] Zilio S C. Simultaneous thickness and group index measurement with a single arm low-coherence interferometer[J]. Opt Exp, 2014, 22(22): 27392-27397.

[14] [14] Sanjit K D, Mahendra P K. Improved optical profiling using the spectral phase in spectrally resolved white-light interferometry[J]. Appl Opt, 2006, 45(27): 6965-6972.

[15] [15] Li Jinpeng, Song Le, Chen Lei. Quadratic polar coordinate transform technique for the demodulation of circular carrier interferogram[J]. Opt Commun, 2015, 336: 166-172.